期刊
NANO LETTERS
卷 16, 期 5, 页码 3341-3347出版社
AMER CHEMICAL SOC
DOI: 10.1021/acs.nanolett.6b00974
关键词
Single crystal diamond; integrated optics; photonic circuits; optical microresonators
类别
资金
- Australian Research Council (ARC) Linkage project [LP100100524]
- ARC Discovery Project [DP 1096288]
- Karlsruhe School of Optics and Photonics (KSOP)
- Deutsche Telekom Stiftung
- Australian Research Council [LP100100524] Funding Source: Australian Research Council
Diamond has emerged as a promising platform for nanophotonic, optical, and quantum technologies. High quality, single crystalline substrates of acceptable size are a prerequisite to meet the demanding requirements on low-level impurities and low absorption loss when targeting large photonic circuits. Here, we describe a scalable fabrication method for single crystal diamond membrane windows that achieves three major goals with one fabrication method: providing high quality diamond, as confirmed by Raman spectroscopy; achieving homogeneously thin membranes, enabled by ion implantation; and providing compatibility with established planar fabrication via lithography and vertical etching. On such suspended diamond membranes we demonstrate a suite of photonic components as building blocks for nanophotonic circuits. Monolithic grating couplers are used to efficiently couple light between photonic circuits and optical fibers. In waveguide coupled optical ring resonators, we find loaded quality factors up to 66 000 at a wavelength of 1560 nm, corresponding to propagation loss below 7.2 dB/cm. Our approach holds promise for the scalable implementation of future diamond quantum photonic technologies and all diamond photonic metrology tools.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据