期刊
TRIBOLOGY INTERNATIONAL
卷 185, 期 -, 页码 -出版社
ELSEVIER SCI LTD
DOI: 10.1016/j.triboint.2023.108575
关键词
Molecular dynamics simulation; AlN; Temperature dependent nanowear; Wear coefficient
This study investigates temperature-dependent material attrition and subsurface lattice damage of single-crystal AlN at different scratching depths/forces using molecular dynamics simulation. A monolayer precision of AlN removal is achieved based on temperature-dependent critical conditions. The number of worn atoms increases exponentially with increasing normal force, influenced by temperature. A wear coefficient normalized with the tangential contact area, K/Atang, is developed to interpret the removal efficiency of AlN substrate with diamond abrasive, independent of load and temperature.
Temperature-dependent material attrition and subsurface lattice damage of single-crystal AlN at various scratching depths/forces are investigated at atomic level using molecular dynamics simulation. An ultimate removal precision of depth down to monolayer of AlN is achieved based on the present temperature-dependent critical conditions. The number of worn atoms, positively influenced by temperature due to the reduction of hardness, increases exponentially with increasing normal force in the plastic domain. Archard-type wear coefficient K values calculated at different temperatures increase linearly with normal force, and the slope is independent of temperature. Independently of load and temperature, a wear coefficient normalized with the tangential contact area, K/Atang, is developed to interpret the removal efficiency of AlN substrate with diamond abrasive.
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