期刊
SOLID-STATE ELECTRONICS
卷 208, 期 -, 页码 -出版社
PERGAMON-ELSEVIER SCIENCE LTD
DOI: 10.1016/j.sse.2023.108743
关键词
GaN stoichiometry; MOSc-HEMT; Etching; SIMS; HAXPES
This study investigates the effect of inductively coupled plasma reactive ion etching (ICP-RIE) combined with atomic layer etching (ALE) on the Al2O3/GaN interface for MOSc-HEMT devices. The results show an increase of the N/Ga ratio near the interface and the presence of impurities in the etched sample.
In this work we present the effect of inductively coupled plasma reactive ion etching (ICP-RIE) combined with atomic layer etching (ALE) on the Al2O3/GaN interface for MOSc-HEMT devices. Time of flight secondary ion mass spectrometry (ToF-SIMS) and hard x-ray photoelectron spectroscopy (HAXPES) highlight an increase of the N/Ga ratio near the interface after etching. ToF-SIMS profiles also show the presence of impurities (H, C, B) at this interface. Atomic force microscopy (AFM) also illustrates a change of the GaN surface morphology for the etched sample.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据