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Article
Engineering, Mechanical
Mohammad Mousavi et al.
Summary: This paper introduces an event-driven vibration sensor that converts ambient vibrations into voltage using a triboelectric-nanogenerator (TENG) to drive a MEMS switch. Experimental results show that the MEMS-TENG can supply the MEMS switch with a good signal-to-noise ratio, sensitivity, and accuracy.
MECHANICAL SYSTEMS AND SIGNAL PROCESSING
(2023)
Review
Chemistry, Multidisciplinary
Taili Du et al.
Summary: With the development of autonomous/smart technologies and the Internet of Things, wireless sensor nodes play a vital role in intelligent mechanical engineering. However, traditional power supply methods face challenges such as layout difficulties and environmental pollution. Therefore, it is crucial to harvest mechanical vibration energy using technologies like the triboelectric nanogenerator to provide in situ power supply for these nodes. This review systematically reviews recent achievements and discusses challenges and development orientation for mechanical vibration energy harvesting based on TENG, which will contribute to the future development of intelligent mechanical engineering in the era of IoT.
Article
Chemistry, Physical
Mohammad Alzgool et al.
Summary: A self-powered triboelectric accelerometer in micro scale was developed using CMOS-compatible processes and triboelectric nanogenerator technology. The device operates in contact-separation mode and was fabricated using MEMS technology with a multi-layer design. An aluminum and polyimide triboelectric pair was used, generating charges on contact. The output voltage of the fabricated accelerometer linearly correlates with acceleration, with a maximum sensitivity of 70 mV/g at 700 Hz excitation frequency.
Article
Materials Science, Multidisciplinary
Mallikarjuna Korrapati et al.
Summary: Flexible vibration sensors extend sensor applications to wearable devices, detecting the body's mechano-vibration signatures and providing better measurement in curved shapes. These sensors, utilizing highly sensitive mechanisms, offer ultrahigh displacement sensitivity and good dynamic response.
MACROMOLECULAR MATERIALS AND ENGINEERING
(2022)
Article
Chemistry, Multidisciplinary
Lu Liu et al.
Summary: This paper reports a direct current TENG (DC-TENG) to address the issue of output attenuation in high humidity environments for traditional TENGs. It is found that high humidity enhances the sliding triboelectrification effect and electrostatic breakdown process, leading to improved output performance.
Article
Multidisciplinary Sciences
Yijia Lu et al.
Summary: The lip-language decoding system proposed in this study integrates self-powered triboelectric sensors and a well-trained dilated recurrent neural network model based on prototype learning. The system shows great feasibility and potential in applications such as identity recognition and toy car control, providing a promising way for people lacking a voice to live a convenient life with barrier-free communication.
NATURE COMMUNICATIONS
(2022)
Article
Chemistry, Physical
Mohammad Alzgool et al.
Summary: This work demonstrates zero-power shock sensing using a micro-triboelectric generator and MEMS electrostatic actuator system. The generator converts mechanical shock into voltage, which is then utilized to actuate a MEMS switch. Through the integration of MEMS technology, the fabrication process of a Triboelectric-Nano-Generator (TENG) is presented for the first time. The TENG shows the ability to provide a voltage difference of up to 0.4V at 2.3g acceleration and successfully actuates a cantilevered MEMS switch.
Article
Chemistry, Physical
Linfeng Wang et al.
Summary: This research proposes a novel self-powered versatile electret sensor for detecting moving objects in large-scale machinery. By integrating deep learning methods, the sensor achieves high accuracy and intelligent sensing. Furthermore, a specific object sensor is designed for inhalation monitoring. The study provides crucial support for real-time health and safety monitoring and digitalization of large-scale machinery.
Article
Chemistry, Physical
Xuecheng Qu et al.
Summary: This study proposes a flexible fingerprint-shaped triboelectric tactile sensor that can achieve multifunctional capabilities and low power consumption in the field of intelligent prosthetics. The sensor has a fast response speed, low detection limit, and can perform various functions such as pressure intensity and position detection.
Article
Nanoscience & Nanotechnology
Jianfeng Zhang et al.
Summary: This study presents a washable and breathable electret sensor based on a hydro-charging technique. By optimizing various factors, the surface potential of the electret fabric can be improved, resulting in better stability and high air permeability. The sensor demonstrates excellent sensitivity and durability, making it suitable for wearable electronics.
ACS APPLIED MATERIALS & INTERFACES
(2022)
Article
Automation & Control Systems
Nabid Aunjum Hossain et al.
Summary: Load sensing total knee replacement (TKR) implants are useful for monitoring prosthesis health and providing quantitative data. Implementing triboelectric energy harvesters in knee implant package can generate power for embedded digitization and communications circuitry. Experiments show the potential of developing a self-powered instrumented knee implant for long-term in vivo knee joint force measurement.
IEEE-ASME TRANSACTIONS ON MECHATRONICS
(2021)
Article
Engineering, Electrical & Electronic
Meysam Daeichin et al.
Summary: This study demonstrates the feasibility of obtaining electrical read-out data from a capacitive MEMS accelerometer with a repulsive electrode configuration, allowing for large-stroke vibrations of microstructures without the pull-in failure of conventional accelerometers. The MEMS device has high mechanical sensitivity, with the ability to use large bias voltages for enhanced resolution and tunable frequency range.
IEEE SENSORS JOURNAL
(2021)
Article
Chemistry, Physical
Yanhong Li et al.
Summary: By achieving high charge density through fast charge accumulation on dielectric material with high relative permittivity, the output performance of TENG can be significantly improved. Fast charge accumulation also helps to achieve higher charge density in high humidity environments, providing important guidance for optimizing TENG performance.
ADVANCED ENERGY MATERIALS
(2021)
Article
Instruments & Instrumentation
Mohammad Mousavi et al.
Summary: This study presents an automatic shock-sensing trigger system consisting of a bi-stable triboelectric transducer and a levitation-based electrostatic mechanism, which can be utilized in air bag deployment devices and powerline protection systems. The system combines mechanical shock sensitivity with an electrostatic switch mechanism, providing an autonomous actuation and sensing stand-alone system. The theoretical framework of this system is validated by experimental results.
SMART MATERIALS AND STRUCTURES
(2021)
Article
Multidisciplinary Sciences
Minglu Zhu et al.
Summary: The authors propose a triboelectric bi-directional sensor-based exoskeleton sensory system for monitoring the movements of human upper limb joints and controlling virtual characters and robotic arms in real-time. This system has the potential to be an economic and advanced human-machine interface for various applications such as robotic automation, healthcare, and training.
NATURE COMMUNICATIONS
(2021)
Review
Chemistry, Multidisciplinary
Jing Qin et al.
Summary: Sensors that can simulate human skin have gained extensive attention, with flexible capacitive sensors playing a key role in various fields. The design of microstructures is crucial for improving sensitivity, with five commonly used microstructures for pressure sensors and four for strain sensors. The advantages, disadvantages, and practical values of different structures are systematically elaborated to guide the development of advanced flexible and stretchable capacitive sensors.
ADVANCED MATERIALS
(2021)
Article
Engineering, Electrical & Electronic
Mohammad Mousavi et al.
Summary: By applying electrostatic levitation force to the initially-closed gap-closing electrodes of our micro-electro-mechanical system (MEMS), multiple actuation mechanisms are created, opening up new possibilities for MEMS applications. The experimental results demonstrate the correlation between pressure and interaction force at the release instant, shown through two mechanisms: a pressure sensor and a pressure switch. Additionally, the study reveals that the potential voltage between the gap-closing electrodes in pulled-in position significantly influences surface interactions.
IEEE SENSORS JOURNAL
(2021)
Article
Chemistry, Physical
Mohammed A. Adly et al.
Summary: This paper investigates the application of the triboelectric effect in an inertial motion sensor, developing a theoretical model and experimental device. Through parametric studies and optimization techniques, the device performance was improved and the effectiveness of the optimization techniques was demonstrated.
Review
Chemistry, Physical
Hao Lei et al.
Summary: Self-powered pressure sensors based on triboelectric nanogenerator have gained attention for their potential applications in the Internet of Things. These sensors optimize power consumption and performance. Efforts are ongoing to improve sensing performance to meet practical demands.
JOURNAL OF MATERIALS CHEMISTRY A
(2021)
Article
Nanoscience & Nanotechnology
Qi Liu et al.
ACS APPLIED MATERIALS & INTERFACES
(2020)
Review
Materials Science, Multidisciplinary
Dong Wook Kim et al.
NPG ASIA MATERIALS
(2020)
Article
Materials Science, Multidisciplinary
Chunlei Zhang et al.
APPLIED MATERIALS TODAY
(2020)
Article
Chemistry, Multidisciplinary
Liming Chen et al.
Article
Nanoscience & Nanotechnology
Xiangguang Han et al.
MICROSYSTEMS & NANOENGINEERING
(2020)
Article
Nanoscience & Nanotechnology
Bentolhoda Hadavi Moghadam et al.
ACS APPLIED NANO MATERIALS
(2020)
Article
Computer Science, Information Systems
Qichao Yang et al.
Article
Mechanics
Attilio Frangi et al.
INTERNATIONAL JOURNAL OF NON-LINEAR MECHANICS
(2019)
Article
Instruments & Instrumentation
Alwathiqbellah Ibrahim et al.
SMART MATERIALS AND STRUCTURES
(2019)
Article
Chemistry, Multidisciplinary
Shaobo Gong et al.
ADVANCED FUNCTIONAL MATERIALS
(2019)
Proceedings Paper
Engineering, Electrical & Electronic
Ryosuke Suzuki et al.
2019 IEEE 32ND INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS)
(2019)
Proceedings Paper
Computer Science, Artificial Intelligence
Jagadiswaran Chelvarajah et al.
INTERNATIONAL CONFERENCE ON COMPUTER VISION AND MACHINE LEARNING
(2019)
Article
Multidisciplinary Sciences
Jun Peng et al.
Article
Engineering, Electrical & Electronic
Lior Medina et al.
SENSORS AND ACTUATORS A-PHYSICAL
(2016)
Article
Engineering, Electrical & Electronic
Michael L. Kuntzman et al.
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
(2015)
Article
Acoustics
Michael L. Kuntzman et al.
JOURNAL OF THE ACOUSTICAL SOCIETY OF AMERICA
(2014)
Article
Chemistry, Multidisciplinary
Simiao Niu et al.
ENERGY & ENVIRONMENTAL SCIENCE
(2013)
Article
Engineering, Electrical & Electronic
Matthew D. Williams et al.
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
(2012)
Article
Engineering, Electrical & Electronic
David T. Martin et al.
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
(2007)
Article
Acoustics
ST Hansen et al.
JOURNAL OF THE ACOUSTICAL SOCIETY OF AMERICA
(2004)
Article
Acoustics
A Narimani et al.
JOURNAL OF VIBRATION AND CONTROL
(2004)
