期刊
SENSORS
卷 23, 期 14, 页码 -出版社
MDPI
DOI: 10.3390/s23146253
关键词
synthetic wavelength interferometer; femtosecond laser; absolute distance measurement; cyclic error
We propose a phase-locked synthetic wavelength interferometer that eliminates cyclic errors in absolute distance measurements. The phase difference between the reference and measurement paths is fed back into a phase lock-in system to control the synthetic wavelength and achieve zero phase difference. By comparing with the conventional phase-measuring method, we validate the cyclic error removal of the proposed method. With a precision of 0.6 mrad in phase and no observed cyclic errors, the locked error signal analysis confirms the effectiveness of the phase-locked method.
We present a phase-locked synthetic wavelength interferometer that enables a complete elimination of cyclic errors in absolute distance measurements. With this method, the phase difference between the reference and measurement paths is fed back into a phase lock-in system, which is then used to control the synthetic wavelength and set the phase difference to zero using an external cavity acousto-optic modulator. We validated the cyclic error removal of the proposed phase-locked method by comparing it with the conventional phase-measuring method of the synthetic wavelength interferometer. By analyzing the locked error signal, we achieved a precision of 0.6 mrad in phase without any observed cyclic errors.
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