PDMS-filled micro-spring Fabry-Perot cavity for temperature sensing

A highly sensitive fiber-tipped temperature sensor based on polydimethylsiloxane (PDMS)-filled spring Fabry-Perot (FP) cavity has been proposed and experimentally demonstrated. The spring FP cavity is first fabricated on the fiber endface by the two-photon polymerization lithography. After that, PDMS is filled into the cavity to drive the elongation of the flexible spring and thus to functionalize high-performance temperature sensing. Benefiting from the large thermal expansion coefficient of PDMS, the proposed sensor exhibits a maximal temperature sensitivity of 704.3 pm/degrees C with excellent operating repeatability and stability. Besides, by selecting a proper spring constant k, the FP sensitivity can be precisely adjusted in the range of 100-700 pm/degrees C. Thanks to the advantages of high fabrication accuracy and designable property, the proposed sensor could promote numerous usages for customizable temperature sensing.(c) 2023 Optica Publishing Group under the terms of the Optica Open Access Publishing Agreement

Automated summary

A highly sensitive fiber-tipped temperature sensor based on a PDMS-filled spring FP cavity is proposed and demonstrated. The sensor exhibits high temperature sensitivity, excellent repeatability, and stability, with adjustable sensitivity range. It has high fabrication accuracy and can be used for customizable temperature sensing applications.