Wavefront-splitting interferometer based on orbital angular momentum beams

Orbital angular momentum (OAM) interferometers have attracted great attention in metrology. However, OAM interferometers usually have large sizes and are difficult to align. OAM-based wavefront-splitting interferometer (WSI-OAM) can achieve nano-displacement measurement with compact size and easy to align. In this manuscript, we propose and demonstrate a nano-displacement measurement system based on WSI-OAM. A resolution of 0.1 nm with an uncertainty of 0.013 nm is achieved with measurement accuracy higher than 99.87% and linearity close to 99%. This work offers a practical approach to miniaturize and integrate OAM interferometers in metrology.& COPY; 2023 Optica Publishing Group under the terms of the Optica Open Access Publishing Agreement

Automated summary

This paper proposes and demonstrates a nano-displacement measurement system based on WSI-OAM, which features compact size and easy alignment. It achieves high accuracy and linearity with a resolution of 0.1 nm and an uncertainty of 0.013 nm for measuring nanoscale displacements.