4.5 Article

Ultrathin stable Ohmic contacts for high-temperature operation of β-Ga2O3 devices

相关参考文献

注意:仅列出部分参考文献,下载原文获取全部文献信息。
Article Chemistry, Multidisciplinary

Projected Cost of Gallium Oxide Wafers from Edge-Defined Film-Fed Crystal Growth

Karen N. Heinselman et al.

Summary: In this study, a techno-economic analysis is presented to predict the cost of 6-inch β-Ga2O3 wafers fabricated using the EFG method. The analysis reveals a 2x cost advantage of EFG compared to previously reported methods. Key cost parameters for 6-inch β-Ga2O3 wafers are identified and their impact on the final cost is analyzed.

CRYSTAL GROWTH & DESIGN (2022)

Review Physics, Applied

Progress in state-of-the-art technologies of Ga2O3 devices

Chenlu Wang et al.

Summary: Gallium oxide (Ga2O3) is an emerging ultra-wide-bandgap semiconductor with desirable properties, widely used in power electronics and solar-blind ultraviolet photodetectors. This article reviews the latest advances in beta-Ga2O3 power device technologies and discusses solutions to challenging issues in the field.

JOURNAL OF PHYSICS D-APPLIED PHYSICS (2021)

Article Materials Science, Coatings & Films

Performance and reliability of β-Ga2O3 Schottky barrier diodes at high temperature

Karen Heinselman et al.

Summary: Beta-gallium oxide (beta-Ga2O3) is an ultrawide bandgap semiconductor with potential for high-temperature power electronic applications. However, in the fabrication of vertical beta-Ga2O3 Schottky barrier diodes, degradation of the contacts was observed at temperatures above 400 degrees C. Further research and development are needed to ensure stable contacts to Ga2O3 at high temperatures.

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A (2021)

Article Nanoscience & Nanotechnology

Electrical and chemical analysis of Ti/Au contacts to β-Ga2O3

Luke A. M. Lyle et al.

Summary: Chemical and electrical measurements of Ti/(010) beta-Ga2O3 and Ti/(001) beta-Ga2O3 interfaces were conducted with XPS, J-V, and C-V measurements as a function of annealing temperature. The results show that the reactivity of Ti on the beta-Ga2O3 surface strongly affects the electrical performance and stability of Ti/beta-Ga2O3 ohmic contacts at elevated temperatures. The oxidized Ti amount increased with annealing temperature, and the Schottky barrier height had variations with temperature changes.

APL MATERIALS (2021)

Article Nanoscience & Nanotechnology

Accelerated Aging Stability of beta-Ga2O3-Titanium/Gold Ohmic Interfaces

Ming-Hsun Lee et al.

ACS APPLIED MATERIALS & INTERFACES (2020)

Article Nanoscience & Nanotechnology

Interfacial reactions of titanium/gold ohmic contacts with Sn-doped β-Ga2O3

Ming-Hsun Lee et al.

APL MATERIALS (2019)

Article Nanoscience & Nanotechnology

Investigation of the Mechanism for Ohmic Contact Formation in Ti/Al/Ni/Au Contacts to β-Ga2O3 Nanobelt Field-Effect Transistors

Jin-Xin Chen et al.

ACS APPLIED MATERIALS & INTERFACES (2019)

Article Chemistry, Multidisciplinary

Chemical Reactions Impede Thermal Transport Across Metal//iGa2O3 Interfaces

Henry T. Aller et al.

NANO LETTERS (2019)

Review Physics, Applied

A review of Ga2O3 materials, processing, and devices

S. J. Pearton et al.

APPLIED PHYSICS REVIEWS (2018)

Review Engineering, Electrical & Electronic

beta-Ga2O3 for wide-bandgap electronics and optoelectronics

Zbigniew Galazka

SEMICONDUCTOR SCIENCE AND TECHNOLOGY (2018)

Article Materials Science, Multidisciplinary

Contacting Mechanically Exfoliated β-Ga2O3 Nanobelts for (Opto)electronic Device Applications

Jinho Bae et al.

ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY (2017)

Article Engineering, Electrical & Electronic

Ga2O3 MOSFETs Using Spin-On-Glass Source/Drain Doping Technology

Ke Zeng et al.

IEEE ELECTRON DEVICE LETTERS (2017)

Article Multidisciplinary Sciences

Highly conductive nano-sized Magneli phases titanium oxide (TiOx)

Aditya F. Arif et al.

SCIENTIFIC REPORTS (2017)

Review Physics, Applied

State-of-the-art technologies of gallium oxide power devices

Masataka Higashiwaki et al.

JOURNAL OF PHYSICS D-APPLIED PHYSICS (2017)

Article Engineering, Electrical & Electronic

Electrical behavior of β-Ga2O3 Schottky diodes with different Schottky metals

Yao Yao et al.

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B (2017)

Article Physics, Applied

Enhancement-mode Ga2O3 MOSFETs with Si-ion-implanted source and drain

Man Hoi Wong et al.

APPLIED PHYSICS EXPRESS (2017)

Article Engineering, Electrical & Electronic

Field-Plated Ga2O3 MOSFETs With a Breakdown Voltage of Over 750 V

Man Hoi Wong et al.

IEEE ELECTRON DEVICE LETTERS (2016)

Article Physics, Applied

Electron channel mobility in silicon-doped Ga2O3 MOSFETs with a resistive buffer layer

Man Hoi Wong et al.

JAPANESE JOURNAL OF APPLIED PHYSICS (2016)

Article Chemistry, Physical

Exfoliated β-Ga2O3 nano-belt field-effect transistors for air-stable high power and high temperature electronics

Janghyuk Kim et al.

PHYSICAL CHEMISTRY CHEMICAL PHYSICS (2016)

Article Materials Science, Multidisciplinary

Communication-A (001) beta-Ga2O3 MOSFET with+2.9 V Threshold Voltage and HfO2 Gate Dielectric

Marko J. Tadjer et al.

ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY (2016)

Article Instruments & Instrumentation

Measurement of the electrical resistivity and Hall coefficient at high temperatures

Kasper A. Borup et al.

REVIEW OF SCIENTIFIC INSTRUMENTS (2012)

Article Materials Science, Multidisciplinary

Titanium diffusion in gold thin films

William E. Martinez et al.

THIN SOLID FILMS (2010)