☆ 4.6 Review

Confined Etchant Layer Technique: An Electrochemical Approach to Micro-/Nanomachining

JOURNAL OF PHYSICAL CHEMISTRY C (2023)

相关参考文献

注意：仅列出部分参考文献，下载原文获取全部文献信息。

Article Electrochemistry

Micromachining of predesigned perpendicular copper micropillar array by scanning electrochemical microscopy

Lianhuan Han et al.

Summary: Electrochemical micromachining (ECMM) is an important nontraditional precision machining technique that allows gentle electrochemical reactions at normal temperature and pressure. The combination of scanning electrochemical microscopy (SECM) direct-writing mode and ultrashort voltage pulse (USVP) modulations was successfully applied to fabricate copper micropillar arrays. Optimization of technical parameters using multiple parameters central composite experimental designs demonstrated the powerful capability of SECM in the controllable micromachining of perpendicular metallic microstructures.

ELECTROCHIMICA ACTA (2023)

添加到收藏夹

Article Chemistry, Analytical

Large-area homogeneous corrosion process for electrochemical nanoimprint lithography on GaAs wafer by modulating contact pressure

Qinghui Meng et al.

Summary: Electrochemical nanoimprint lithography (ECNL) is a promising manufacturing technology for creating three-dimensional micro/nano-structures directly on semiconductors. The contact pressure and its uniformity between the metallized mold and semiconductor workpiece are crucial for product quality. Through experiments and theoretical analyses, it was found that optimizing the pressure improves efficiency and accuracy, while excessive pressure causes mold distortion and defects. A dual-cushion omnidirectional structure was designed to improve imprint uniformity in large areas. Finite element simulations matched experimental results, providing instructive guidance for optimizing ECNL technical parameters.

JOURNAL OF ELECTROANALYTICAL CHEMISTRY (2022)

添加到收藏夹

Article Chemistry, Multidisciplinary

Spatially-separated and photo-enhanced semiconductor corrosion processes for high-efficient and contamination-free electrochemical nanoimprint lithography

Hantao Xu et al.

Summary: This research proposes a new electrochemical nanoimprint lithography (ECNL) technique for direct fabrication of three-dimensional micro/nano-structures (3D-MNSs) on a semiconductor wafer. By changing the structure of the corrosion cell and utilizing photo-enhancement, the corrosion rate is stabilized, resulting in improved accuracy and efficiency.

SCIENCE CHINA-CHEMISTRY (2022)

添加到收藏夹

Article Nanoscience & Nanotechnology

Closed-Loop Nanopatterning of Liquids with Dip-Pen Nanolithography

Verda Saygin et al.

Summary: This study presents a closed-loop method for patterning liquid samples at nanoscale using scanning probe lithography, achieving high accuracy and precision through the use of tipless scanning probes and a novel two-harmonic inertial sensing scheme. By combining fluid mechanics-based iterative control, real-time closed-loop control over patterning is achieved, making scanning probe lithography of liquids a promising candidate for nanoscale manipulation of liquids in high-throughput chemistry.

ACS APPLIED MATERIALS & INTERFACES (2021)

添加到收藏夹

Article Electrochemistry

Pulse Potential Confined Electrochemical Polishing on Gallium Arsenide Wafer

Lianhuan Han et al.

Summary: Electrochemistry is shown to be a crucial tool in precision machining, with the ability to control the concentration distribution of electrogenerated etchant via pulse frequency. By utilizing a theoretical model and finite element analysis, researchers have successfully reduced the roughness of a GaAs workpiece from 700 nm to 5.1 nm through electrochemical polishing.

JOURNAL OF THE ELECTROCHEMICAL SOCIETY (2021)

添加到收藏夹

Article Engineering, Electrical & Electronic

Chemical Etching Processes at the Dynamic GaAs/Electrolyte Interface in the Electrochemical Direct-Writing Micromachining

Lianhuan Han et al.

Summary: This study demonstrates the use of scanning electrochemical microscopy for fabricating functional three-dimensional micro/nanostructures on semiconductor wafers. Various parameters affecting the machining results were analyzed, and a numerical model was established for predicting and controlling the machining outcomes. The unexpected microbulges during the machining process were found to be caused by insufficient mass transport and precipitation of the etching product, providing guidance for controllable microfabrication on semiconductor wafers.

ACS APPLIED ELECTRONIC MATERIALS (2021)

添加到收藏夹

Article Chemistry, Multidisciplinary

Direct Nanomachining on Semiconductor Wafer By Scanning Electrochemical Microscopy

Lianhuan Han et al.

ANGEWANDTE CHEMIE-INTERNATIONAL EDITION (2020)

添加到收藏夹

Review Chemistry, Physical

Electrochemical nanomachining

Lianhuan Han et al.

CURRENT OPINION IN ELECTROCHEMISTRY (2020)

添加到收藏夹

Article Engineering, Industrial

Photoelectrochemical mechanical polishing method for n-type gallium nitride

Zhigang Dong et al.

CIRP ANNALS-MANUFACTURING TECHNOLOGY (2019)

添加到收藏夹

Article Chemistry, Physical

Tip-Substrate Distance-Dependent Etching Process of III-V Semiconductors Investigated by Scanning Electrochemical Microscopy

Jie Zhang et al.

JOURNAL OF PHYSICAL CHEMISTRY C (2019)

添加到收藏夹

Article Chemistry, Physical

Interfacial Reactions and Mass Transport in the Processes of Electrochemical Nanoimprint Lithography

Jie Zhang et al.

JOURNAL OF PHYSICAL CHEMISTRY C (2019)

添加到收藏夹

Article Automation & Control Systems

Photoelectrochemically combined mechanical polishing of n-type gallium nitride wafer by using metal nanoparticles as photocathodes

Liwei Ou et al.

INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY (2019)

添加到收藏夹

Article Chemistry, Multidisciplinary

Photoelectric effect accelerated electrochemical corrosion and nanoimprint processes on gallium arsenide wafers

Chengxin Guo et al.

CHEMICAL SCIENCE (2019)

添加到收藏夹

Article Chemistry, Multidisciplinary

Localized Pulsed Electrodeposition Process for Three-Dimensional Printing of Nanotwinned Metallic Nanostructures

Soheil Daryadel et al.

NANO LETTERS (2018)

添加到收藏夹

Article Chemistry, Multidisciplinary

The coupling effect of slow-rate mechanical motion on the confined etching process in electrochemical mechanical micromachining

Lianhuan Han et al.

SCIENCE CHINA-CHEMISTRY (2018)

添加到收藏夹

Article Chemistry, Multidisciplinary

Microscale 3D Printing of Nanotwinned Copper

Ali Behroozfar et al.

ADVANCED MATERIALS (2018)

添加到收藏夹

Article Chemistry, Physical

Etching Kinetics of III-V Semiconductors Coupled with Surface Passivation Investigated by Scanning Electrochemical Microscopy

Jie Zhang et al.

JOURNAL OF PHYSICAL CHEMISTRY C (2017)

添加到收藏夹

Article Chemistry, Multidisciplinary

Electrochemical nanoimprint lithography: when nanoimprint lithography meets metal assisted chemical etching

Jie Zhang et al.

NANOSCALE (2017)

添加到收藏夹

Article Chemistry, Multidisciplinary

Nanofabrication of the gold scanning probe for the STM-SECM coupling system with nanoscale spatial resolution

Fang-Fang Wang et al.

SCIENCE CHINA-CHEMISTRY (2017)

添加到收藏夹

Article Chemistry, Multidisciplinary

Contact electrification induced interfacial reactions and direct electrochemical nanoimprint lithography in n-type gallium arsenate wafer

Jie Zhang et al.

CHEMICAL SCIENCE (2017)

添加到收藏夹

Article Electrochemistry

Tip current/positioning close-loop mode of scanning electrochemical microscopy for electrochemical micromachining

Lianhuan Han et al.

ELECTROCHEMISTRY COMMUNICATIONS (2017)

添加到收藏夹

Article Electrochemistry

Electrochemical nanoimprint lithography directly on n-type crystalline silicon (111) wafer

Lin Zhang et al.

ELECTROCHEMISTRY COMMUNICATIONS (2017)

添加到收藏夹

Review Chemistry, Multidisciplinary

Electrochemical micro/nano-machining: principles and practices

Dongping Zhan et al.

CHEMICAL SOCIETY REVIEWS (2017)

添加到收藏夹

Review Chemistry, Multidisciplinary

Confined Chemical Etching for Electrochemical Machining with Nanoscale Accuracy

Dongping Zhan et al.

ACCOUNTS OF CHEMICAL RESEARCH (2016)

添加到收藏夹

Article Chemistry, Physical

Kinetic Investigation on the Photoetching Reaction of n-Type GaAs by Scanning Electrochemical Microscopy

Junhui Lai et al.

JOURNAL OF PHYSICAL CHEMISTRY C (2016)

添加到收藏夹

Article Chemistry, Multidisciplinary

Electropolishing of titanium alloy under hydrodynamic mode

Pei Huang et al.

SCIENCE CHINA-CHEMISTRY (2016)

添加到收藏夹

Article Chemistry, Multidisciplinary

Electrochemical buckling microfabrication

Jie Zhang et al.

CHEMICAL SCIENCE (2016)

添加到收藏夹

Article Chemistry, Multidisciplinary

High-Resolution Printing of 3D Structures Using an Electrohydrodynamic Inkjet with Multiple Functional Inks

Byeong Wan An et al.

ADVANCED MATERIALS (2015)

添加到收藏夹

Article Chemistry, Multidisciplinary

Synergetic effect enhanced photoelectrocatalysis

Jingchun Jia et al.

CHEMICAL COMMUNICATIONS (2015)

添加到收藏夹

Article Electrochemistry

Electrochemical Micromachining under Mechanical Motion Mode

Yuan Ye et al.

ELECTROCHIMICA ACTA (2015)

添加到收藏夹

Article Chemistry, Multidisciplinary

Dielectric-dependent electron transfer behaviour of cobalt hexacyanides in a solid solution of sodium chloride

Di Huang et al.

CHEMICAL SCIENCE (2015)

添加到收藏夹

Article Chemistry, Physical

Kinetic Investigation on the Confined Etching System of n-Type Gallium Arsenide by Scanning Electrochemical Microscopy

Jie Zhang et al.

JOURNAL OF PHYSICAL CHEMISTRY C (2014)

添加到收藏夹

Article Chemistry, Analytical

A Leveling Method Based on Current Feedback Mode of Scanning Electrochemical Microscopy

Lianhuan Han et al.

ANALYTICAL CHEMISTRY (2013)

添加到收藏夹

Article Chemistry, Multidisciplinary

A novel planarization method based on photoinduced confined chemical etching

Qiuyan Fang et al.

CHEMICAL COMMUNICATIONS (2013)

添加到收藏夹

Article Chemistry, Multidisciplinary

Meniscus confined fabrication of multidimensional conducting polymer nanostructures with scanning electrochemical cell microscopy (SECCM)

Kim McKelvey et al.

CHEMICAL COMMUNICATIONS (2013)

添加到收藏夹

Article Electrochemistry

High precision electrochemical micromachining based on confined etchant layer technique

Lei-Jie Lai et al.

ELECTROCHEMISTRY COMMUNICATIONS (2013)

添加到收藏夹

Article Chemistry, Physical

Electrochemical mechanical micromachining based on confined etchant layer technique

Ye Yuan et al.

FARADAY DISCUSSIONS (2013)

添加到收藏夹

Article Chemistry, Analytical

Electrochemical Behaviors of Single Microcrystals of Iron Hexacyanides/NaCl Solid Solution

Dongping Zhan et al.

ANALYTICAL CHEMISTRY (2012)

添加到收藏夹

Article Chemistry, Multidisciplinary

Fabrication and characterization of nanostructured ZnO thin film microdevices by scanning electrochemical cell microscopy

Dongping Zhan et al.

CHEMICAL COMMUNICATIONS (2012)

添加到收藏夹

Article Chemistry, Multidisciplinary

Solid-State Redox Solutions: Microfabrication and Electrochemistry

Dezhi Yang et al.

ANGEWANDTE CHEMIE-INTERNATIONAL EDITION (2011)

添加到收藏夹

Article Chemistry, Multidisciplinary

Do Molecular Conductances Correlate with Electrochemical Rate Constants? Experimental Insights

Xiao-Shun Zhou et al.

JOURNAL OF THE AMERICAN CHEMICAL SOCIETY (2011)

添加到收藏夹

Review Engineering, Manufacturing

Recent Researches in Micro Electrical Machining

Do Kwan Chung et al.

INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING (2011)

添加到收藏夹

Article Chemistry, Multidisciplinary

Protein Immobilization on Ni(II) Ion Patterns Prepared by Microcontact Printing and Dip-Pen Nanolithography

Chien-Ching Wu et al.

ACS NANO (2010)

添加到收藏夹

Article Multidisciplinary Sciences

Meniscus-Confined Three-Dimensional Electrodeposition for Direct Writing of Wire Bonds

Jie Hu et al.

SCIENCE (2010)

添加到收藏夹

Article Electrochemistry

A potential method for electrochemical micromachining of titanium alloy Ti6Al4V

L. M. Jiang et al.

JOURNAL OF APPLIED ELECTROCHEMISTRY (2008)

添加到收藏夹

Article Chemistry, Multidisciplinary

The creation of nanostructures on an Au(111) electrode by tip-induced iron deposition from an ionic liquid

Yi-Min Wei et al.

SMALL (2008)

添加到收藏夹

Article Chemistry, Physical

Electrochemical micromachining microstructure lattice on magnesium alloy surface

Jiang Li-Min et al.

ACTA PHYSICO-CHIMICA SINICA (2008)

添加到收藏夹

Article Chemistry, Multidisciplinary

Microfabrication of a diffractive microlens array on n-GaAs by an efficient electrochemical method

Li Zhang et al.

ADVANCED MATERIALS (2007)

添加到收藏夹

Article Electrochemistry

STM tip-induced nanostructuring of Zn in an ionic liquid on Au(111) electrode surfaces

Jin-Gang Wang et al.

ELECTROCHEMISTRY COMMUNICATIONS (2007)

添加到收藏夹

Article Electrochemistry

Electrochemical micromachining of nitinol by confined-etchant-layer technique

Xin-Zhou Ma et al.

ELECTROCHIMICA ACTA (2007)

添加到收藏夹

Article Chemistry, Physical

A comparative study on electrochemical micromachining of n-GaAs and p-Si by using confined etchant layer technique

Li Zhang et al.

JOURNAL OF PHYSICAL CHEMISTRY B (2006)

添加到收藏夹

Review Chemistry, Multidisciplinary

Nano-chemistry and scanning probe nanolithographies

R Garcia et al.

CHEMICAL SOCIETY REVIEWS (2006)

添加到收藏夹

Article Chemistry, Analytical

Three-dimensional micro-fabrication on copper and nickel

LM Jiang et al.

JOURNAL OF ELECTROANALYTICAL CHEMISTRY (2005)

添加到收藏夹

Article Electrochemistry

A preliminary study on chemical micro-machining of complex three-dimensional patterns on silicon substrates

K Shi et al.

JOURNAL OF SOLID STATE ELECTROCHEMISTRY (2005)

添加到收藏夹

Review Engineering, Electrical & Electronic

Fabrication trends for free-space microoptics

TJ Suleski et al.

JOURNAL OF LIGHTWAVE TECHNOLOGY (2005)

添加到收藏夹

Review Engineering, Electrical & Electronic

Applications of LIGA technology to precision manufacturing of high-aspect-ratio micro-components and -systems: a review

CK Malek et al.

MICROELECTRONICS JOURNAL (2004)

添加到收藏夹

Review Chemistry, Analytical

Micro total analysis systems. Recent developments

T Vilkner et al.

ANALYTICAL CHEMISTRY (2004)

添加到收藏夹

Article Electrochemistry

Electrochemical micromachining, polishing and surface structuring of metals: fundamental aspects and new developments

D Landolt et al.

ELECTROCHIMICA ACTA (2003)

添加到收藏夹

Article Chemistry, Physical

Nanostructuring of a sodium dodecyl sulfate-covered Au(111) electrode

M Petri et al.

PHYSICAL CHEMISTRY CHEMICAL PHYSICS (2002)

添加到收藏夹

Review Chemistry, Multidisciplinary

Electrochemical nanostructuring with ultrashort voltage pulses

V Kirchner et al.

ACCOUNTS OF CHEMICAL RESEARCH (2001)

添加到收藏夹

Article Multidisciplinary Sciences

Electrochemical micromachining

R Schuster et al.

SCIENCE (2000)

添加到收藏夹

© Peeref 2019-2024. All rights reserved.