4.7 Article

Microstructure and strain rate dependences of plastic deformation in diamond-like carbon films during nanoindentation

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JOURNAL OF NON-CRYSTALLINE SOLIDS
卷 616, 期 -, 页码 -

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ELSEVIER
DOI: 10.1016/j.jnoncrysol.2023.122467

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Diamond-like carbon; Microstructures; Strain rate sensitivity; Plastic deformation; Nanoindentation

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In this study, the microstructure and strain rate dependences of plastic deformation in magnetron sputtered DLC films were investigated. The mechanical responses of the films to different microstructures were discussed, and the underlying deformation mechanisms were identified in terms of strain rate sensitivity. The results revealed that the mechanical behaviors of the films are influenced by both the initial internal hybridized structures and the external loading conditions.
Despite growing interest in scientific researches and engineering applications of diamond-like carbon (DLC) films, the fundamental deformation mechanisms that govern mechanical properties still remain unclear. In this work, the microstructure and strain rate dependences of plastic deformation in magnetron sputtered DLC films were investigated by employing nanoindentation tests and molecular dynamics simulations. Firstly, the mechanical responses of the films to the varied microstructures with sputtering power were discussed. Then, the underlying deformation mechanisms of the films were identified in terms of the strain rate sensitivity with m in a wide range of 0.038 similar to 0.122. The experimental and calculated results finally revealed that the mechanical behaviors of the films are dependent upon both the initial internal hybridized structures and the external loading conditions. The deformation driven asymmetrically reversible hybridization transition with strain rate sensitivity could be considered as one of the specific atomic-scale mechanisms of the significant plastic deformation in DLC films.

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