期刊
MICROSCOPY AND MICROANALYSIS
卷 22, 期 1, 页码 237-249出版社
CAMBRIDGE UNIV PRESS
DOI: 10.1017/S1431927615015664
关键词
pixel array detector (PAD); STEM; high dynamic range; mixed-mode pixel array detector (MM-PAD); electron microscope pixel array detector (EMPAD)
资金
- U.S. Department of Energy [DE-FG02-10ER46693]
- CHESS
- U.S. National Science Foundation
- U.S. National Institutes of Health National Institute of General Medical Sciences [DMR-1332208]
- Kavli Institute at Cornell for Nanoscale Science
- Cornell Center for Materials Research, an NSF MRSEC [DMR 1120296]
We describe a hybrid pixel array detector (electron microscope pixel array detector, or EMPAD) adapted for use in electron microscope applications, especially as a universal detector for scanning transmission electron microscopy. The 128x128 pixel detector consists of a 500 mu m thick silicon diode array bump-bonded pixel-by-pixel to an application-specific integrated circuit. The in-pixel circuitry provides a 1,000,000: 1 dynamic range within a single frame, allowing the direct electron beam to be imaged while still maintaining single electron sensitivity. A 1.1 kHz framing rate enables rapid data collection and minimizes sample drift distortions while scanning. By capturing the entire unsaturated diffraction pattern in scanning mode, one can simultaneously capture bright field, dark field, and phase contrast information, as well as being able to analyze the full scattering distribution, allowing true center of mass imaging. The scattering is recorded on an absolute scale, so that information such as local sample thickness can be directly determined. This paper describes the detector architecture, data acquisition system, and preliminary results from experiments with 80-200 keV electron beams.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据