期刊
CHEMICAL COMMUNICATIONS
卷 51, 期 86, 页码 15692-15695出版社
ROYAL SOC CHEMISTRY
DOI: 10.1039/c5cc05272f
关键词
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资金
- IWT (Agency for innovation by science and technology in Belgium)
We demonstrate the impact of reducing agents for Chemical Vapor Deposition (CVD) and Atomic Layer Deposition (ALD) of WS2 from WF6 and H2S precursors. Nanocrystalline WS2 layers with a two-dimensional structure can be obtained at low deposition temperatures (300-450 degrees C) without using a template or anneal.
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