期刊
IEEE SENSORS JOURNAL
卷 23, 期 13, 页码 14025-14040出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JSEN.2023.3279229
关键词
Sensors; Magnetic sensors; Magnetostriction; Magnetoelectric effects; Magnetic flux; Mechanical sensors; Magnetometers; Biomagnetic recording; electronic sensor readout; multiferroic sensor; strain modulation
Low noise, low power consumption sensors are necessary for detecting biomagnetic potentials generated by the human body. This paper presents a strain-modulated FeCo-Hf/AlScN-based sensor with a bandwidth of 3.4 kHz and a magnetic noise spectral density of 59.5 pT/v Hz before demodulation and 98.5 pT/v Hz after demodulation in an unshielded environment. The sensor, including flux concentrators, has a footprint of 0.125 cm(2), and the total power consumption of the PCB-based readout electronics is 440 mW. The paper also provides a theoretical analysis on the scaling of sensitivity and noise spectral density for modulated multiferroic sensor systems.
Low noise sensors with low power consumption are needed for sensing the biomagnetic potentials produced by the human body. Compared to their electrical counterparts, biomagnetic sensors are noninvasive and noncontact. A strain-modulated FeCo-Hf/AlScN-based sensor with a bandwidth of 3.4 kHz and a magnetic noise spectral density at 1 kHz of 59.5 pT/v Hz before demodulation and 98.5 pT/v Hz after demodulation in an unshielded environment is presented. The footprint of the sensor including flux concentrators is 0.125 cm(2), and the total power consumption of the printed circuit board (PCB)-based readout electronics is 440 mW. A theoretical analysis for the scaling of the sensitivity and the noise spectral density of modulated multiferroic sensor systems is presented.
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