4.6 Article

Low-Thermal-Budget Fabrication of Transparent Ferroelectric Thin-Film Transistors on Glass Substrates

期刊

IEEE ELECTRON DEVICE LETTERS
卷 44, 期 9, 页码 1460-1463

出版社

IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/LED.2023.3296017

关键词

Transistors; Substrates; Glass; Logic gates; Indium tin oxide; Next generation networking; Threshold voltage; Ferroelectric materials; ferroelectric memories; ferroelectric thin-film transistors; thermal budget; transparent electronics

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This study presents a low-thermal-budget transparent ferroelectric transistor with high transmittance and good switching performance, which is suitable for next-generation transparent display technologies.
Ferroelectric transistors are promising for next-generation display applications due to their nonvolatile memory functionalities, low power consumption, and high-speed operation. However, conventional ferroelectric transistors are fabricated using nontransparent materials with high-temperature processes, making them unsuitable for display applications. In this study, we fabricated a low-thermal-budget transparent ferroelectric transistor at a temperature below 400 degrees C. This device exhibits a transmittance of 82% under visible light as well as a high switching speed and endurance. The high transmittance and low-temperature fabrication process make it an ideal candidate for use in next-generation transparent display technologies. This study demonstrates a significant advancement in the field of ferroelectric transistors and transparent electronics; the suggested device has the potential to be used in electronic devices for transparent display applications.

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