Development of a Probe System for Measuring Plasma Parameters under Conditions of Plasma Polymerization and Synthesis of Nanostructures

In this work, the probe system developed by us earlier for plasma diagnostics under the conditions of plasma polymerization and synthesis of carbon nanostructures was constructively developed. The probe system is supplemented with a block that allows cleaning the probe with ion current, as well as obtaining the second derivative of the probe current-voltage characteristic by the harmonic method. The probe system was tested on the example of plasma diagnostics in a mixture of He + 0.1% CH4.

Automated summary

In this study, we improved the probe system for plasma diagnostics that we previously developed for plasma polymerization and synthesis of carbon nanostructures. The probe system was supplemented with a module for probe cleaning using ion current and obtaining the second derivative of the probe current-voltage characteristic using the harmonic method. The probe system was tested by performing plasma diagnostics in a mixture of He + 0.1% CH4.