Influence of the microstructure of sputtered Ti films on the anodization toward TiO2 nanotube arrays

The microstructure of sputtered Ti films plays a crucial role in the formation of TiO2 nanotube arrays (TNTs) via anodization. Magnetron sputtering under controllable parameters was used to create diverse microstructures of Ti films, followed by anodization in an ethylene glycol-based electrolyte. The relationship between the micro-structures of Ti films and the resulting TiO2 layers was analyzed, and the film density was identified as the key microstructure affecting the TNTs formation. The electron aggregation theory explained why denser Ti films facilitate TNTs formation, and confirmatory experiments were performed to validate this theory..

Automated summary

Diverse microstructures of Ti films were created via magnetron sputtering under controllable parameters, followed by anodization in an ethylene glycol-based electrolyte. The relationship between the micro-structures of Ti films and the resulting TiO2 layers was analyzed, with film density identified as the key microstructure affecting the formation of TiO2 nanotube arrays (TNTs). The electron aggregation theory explained why denser Ti films facilitate TNTs formation, and confirmatory experiments were performed to validate this theory.