4.6 Article

Resistive switching localization by selective focused ion beam irradiation

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APPLIED PHYSICS LETTERS
卷 123, 期 12, 页码 -

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AIP Publishing
DOI: 10.1063/5.0151823

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Materials displaying resistive switching can be controlled through focused ion beam irradiation, leading to reduced power consumption and improved control in neuromorphic computing applications.
Materials displaying resistive switching have emerged as promising candidates for implementation as components for neuromorphic computing. Under an applied electric field, certain resistive switching materials undergo an insulator-to-metal transition through the formation of a percolating filament, resulting in large resistance changes. The location and shape of these filaments are strongly influenced by hard-to-control parameters, such as grain boundaries or intrinsic defects, making the switching process susceptible to cycle-to-cycle and device-to-device variation. Using focused Ga+ ion beam irradiation, we selectively engineer defects in VO2 and V2O3 thin films as a case study to control filament formation. Using defect pre-patterning, we can control the position and shape of metallic filaments and reduce the switching power significantly. A greater than three orders of magnitude reduction of switching power was observed in V2O3, and a less than one order of magnitude reduction was observed in VO2. These experiments indicate that selective ion irradiation could be applied to a variety of materials exhibiting resistive switching and could serve as a useful tool for designing scalable, energy efficient circuits for neuromorphic computing.

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