Angular magnetic field dependence of a doubly clamped magnetoelectric resonator

Angular dependence of magnetic field response of fully suspended resonant microelectromechanical double-clamped magnetoelectric beams was investigated as the basis for a vector magnetometer utilizing the magnetically induced change in fundamental resonance frequency. Strain-coupled magnetostrictive iron cobalt (FeCo) and piezoelectric aluminum nitride layers together constitute a magnetoelectric heterostructure with a high magnetic field sensitivity of 70Hz/mT along the beam axis and a transfer function of 47V/T at 10Hz. The fundamental frequency shift to an external magnetic field is found to be strongly anisotropic with a relative variation of more than 3% between perpendicular and parallel field orientations with respect to the long axis of the beam at a field of 100mT. This design can form the basis for an on-chip high sensitivity vector magnetometer operating with ultra-low power when multiplexed with two or more resonators.

Automated summary

The angular dependence of the magnetic field response of fully suspended resonant microelectromechanical double-clamped magnetoelectric beams was investigated as the basis for a vector magnetometer. The magnetoelectric heterostructure, consisting of strain-coupled magnetostrictive iron cobalt (FeCo) and piezoelectric aluminum nitride layers, demonstrated a high magnetic field sensitivity and transfer function. The anisotropic behavior of the fundamental frequency shift to an external magnetic field was observed, making this design suitable for an on-chip high sensitivity vector magnetometer when multiplexed with multiple resonators.