We present broadband on-chip resonators based on SiGe graded-index waveguides operating in the long-wave infrared spectral range from 7.5 to 9.0 μm. High quality factors up to 10^5 have been measured, with an intrinsic quality factor of 1.13 x 10^5 extracted from the measurements. Thermal tuning of the phase in the micro-ring has been utilized to overcome the limitation of the experimental setup in terms of spectral resolution. These results pave the way for the development of integrated frequency combs operating in the long-wave infrared range.
We present broadband on-chip resonators based on SiGe graded-index waveguides operating in the long-wave infrared spectral range from 7.5 to 9.0 mu m wavelength range. A quality factor up to 10(5) has been measured, while an intrinsic quality factor of 1.13 x 10(5) has been extracted from the measurements. Thermal tuning of the phase in the micro-ring has been used to overcome the limitation of the experimental setup in terms of spectral resolution. These results pave the way toward the development of integrated frequency comb operating in the long-wave infrared range.
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