期刊
MEASUREMENT SCIENCE AND TECHNOLOGY
卷 27, 期 8, 页码 -出版社
IOP PUBLISHING LTD
DOI: 10.1088/0957-0233/27/8/085001
关键词
heterodyne interferometry; phase meter; digital signal processing
资金
- National Metrology Institute of Japan (NMIJ)
- National Institute of Advanced Industrial Science and Technology (AIST), Japan
We present a digital algorithm for measuring the phase of a sinusoidal signal that combines the modified digital fringe-counting method with two-sample zero crossing to enable sequential signal processing. This technique can be applied to a phase meter for measuring dynamic phase differences between two sinusoidal signals with high resolution, particularly for heterodyne interferometry. The floor noise obtained from a demonstration with an electrical apparatus is 5 x 10(-8) rad/root Hz at frequencies above approximately 0.1 Hz for 80 kHz signal frequency. In addition, by applying this method to a commercial heterodyne interferometer with a modulation frequency of 80 MHz, the floor-noise level is confirmed to be 7 x 10(-14) m/root Hz from 4 kHz to 1 MHz. We also confirm the validity of the algorithm by comparing its results with those from a standard homodyne interferometer for measuring shock-motion peak acceleration greater than 5000 ms(-2) and a 10 mm stroke.
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