期刊
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
卷 46, 期 -, 页码 1-5出版社
ELSEVIER SCI LTD
DOI: 10.1016/j.mssp.2016.01.020
关键词
Co3O4 nanoparticles; Methane gas sensing; Semiconductor devices
The morphology and gas sensing characteristics of Co3O4 nanoparticles prepared using the microwave irradiation were investigated. XRD and TEM are used to analyze the structural and the morphological properties of the prepared nanoparticles. XRD results confirmed the formation of pure phase of these nanoparticles. The gas sensor based on the synthesis Co3O4 nanoparticles reveals faster response and recovery time at low temperature detection toward methane gas. Specifically, for methane concentration of 1%, the response and the recovery times at 200 degrees C are 100 s and 50 s, respectively. Furthermore, the sensing characteristics of Co3O4 nanoparticles were improved by increasing the operating temperatures and gas concentrations as well. The experimental results clearly demonstrate the potential use of Co3O4 nanoparticles as a sensing material in the fabrication of CH4 sensors. (C) 2016 Elsevier Ltd. All rights reserved.
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