期刊
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
卷 41, 期 -, 页码 519-528出版社
ELSEVIER SCI LTD
DOI: 10.1016/j.mssp.2015.10.024
关键词
Co-evaporation process; Defect evolution; CIGS solar cell
Cu(In,Ga)Se-2 (CIGS) absorber layer is grown on Mo-coated soda-lime glass (SLG) substrates using co-evaporation deposition technique. The growth characteristics of the CIGS films deposited through a three-stage process are examined by interrupting the deposition along the reaction pathway. In the three-stage process, the absorber layer undergoes several phase transformations with Cu content. The gamma-(In,Ga)(2)Se-3 layer is formed first and is then converted to alpha-Cu(In,Ga)Se-2 via beta-Cu(In,Ga)(3)Se-5. When alpha-Cu(In,Ga)Se-2 stoichiometry is reached, Cu2-xSe segregation at the surface and at grain boundaries begins to occur. The Cu2-xSe improved the densification and grain growth of the absorber layer. Then, as the absorber layer reverts to substoichiometric composition, the Cu2-xSe phase disappears and the depleted server Cu near the surface instead. This paper reports several types of defects found in absorber layers that act as non-radiative recombination centers, such as impurity phases (Cu2-xSe and Cu(In,Ga)(3)Se-5), deep point defects (In-Cu), grain boundaries, and voids. The highest efficiency at 10.97% was achieved when the bulk [Cu]/([In]+[Ga]) ratio was 0.98 at the third stage of the process. This result is attributed to the low-concentration deep-level defects that act as recombination centers and to the denser structure with larger grain size. (C) 2015 Elsevier Ltd. All rights reserved.
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