期刊
MATERIALS LETTERS
卷 172, 期 -, 页码 128-131出版社
ELSEVIER SCIENCE BV
DOI: 10.1016/j.matlet.2016.02.161
关键词
Deposition; Sputtering; Multilayer structure; Thin films
资金
- Region of Franche-Comte (FIMICAP and MATECO projects)
- French RENATECH network [ANR-11-LABX-01-01]
We engineer a sputter deposited metal/oxide periodic structure based on W and Ta, and corresponding oxides with tuneable alternations from a few nanometers to a few tens nanometers, combined with the preparation of inclined, zigzag and spiral columns. This work shows how bi-component periodic multilayers can be produced within some inclined nano-columns exhibiting oriented, zigzag and helix structures. This unique combination of controlled columnar structure and periodic multilayers enables new opportunities to create some unusual structural designs for functional materials. (C) 2016 Elsevier B.V. All rights reserved.
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