4.6 Article

Architectured columns with a metal-dielectric periodic nanostructure

期刊

MATERIALS LETTERS
卷 172, 期 -, 页码 128-131

出版社

ELSEVIER SCIENCE BV
DOI: 10.1016/j.matlet.2016.02.161

关键词

Deposition; Sputtering; Multilayer structure; Thin films

资金

  1. Region of Franche-Comte (FIMICAP and MATECO projects)
  2. French RENATECH network [ANR-11-LABX-01-01]

向作者/读者索取更多资源

We engineer a sputter deposited metal/oxide periodic structure based on W and Ta, and corresponding oxides with tuneable alternations from a few nanometers to a few tens nanometers, combined with the preparation of inclined, zigzag and spiral columns. This work shows how bi-component periodic multilayers can be produced within some inclined nano-columns exhibiting oriented, zigzag and helix structures. This unique combination of controlled columnar structure and periodic multilayers enables new opportunities to create some unusual structural designs for functional materials. (C) 2016 Elsevier B.V. All rights reserved.

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