Dielectric Elastomer Cooperative Microactuator Systems-DECMAS

This paper presents results of the first phase of Dielectric Elastomer Cooperative Microactuator Systems (DECMAS), a project within the German Research Foundation Priority Program 2206, Cooperative Multistable Multistage Microactuator Systems (KOMMMA). The goal is the development of a soft cooperative microactuator system combining high flexibility with large-stroke/high-frequency actuation and self-sensing capabilities. The softness is due to a completely polymer-based approach using dielectric elastomer membrane structures and a specific silicone bias system designed to achieve large strokes. The approach thus avoids fluidic or pneumatic compo-nents, enabling, e.g., future smart textile applications with cooperative sensing, haptics, and even acoustic features. The paper introduces design concepts and a first soft, single-actuator demonstrator along with experimental characterization, before expanding it to a 3 x 1 system. This system is used to experimentally study coupling effects, supported by finite element and lumped parameter simulations, which represent the basis for future cooperative control methods. Finally, the paper also introduces a new methodology to fabricate metal-based electrodes of sub-micrometer thickness with high membrane-straining capability and extremely low resistance. These electrodes will enable further miniaturization towards future microscale applications.

Automated summary

This paper presents the first phase results of the Dielectric Elastomer Cooperative Microactuator Systems (DECMAS) project. The goal of this project is to develop a soft cooperative microactuator system with high flexibility, large-stroke/high-frequency actuation, and self-sensing capabilities. The paper introduces design concepts, a single-actuator demonstrator, and a 3 x 1 system for experimental study of coupling effects, and also presents a new methodology for fabricating metal-based electrodes for future microscale applications.