Metasurface Deflector Enhanced Grating Coupler for Perfectly Vertical Coupling

We propose a perfectly vertical coupling scheme based on metasurface deflectors (meta-deflectors) and grating couplers (GCs). An approach for optimizing the GCs based on the Gaussian-fitting using the genetic algorithm is proposed. An meta-deflector based on amorphous silicon (a-Si) pillars is designed to the optimal coupling angle of the GC to ensure good coupling efficiency (CE). Simulations predict peak vertical CE to be 78% at the wavelength of 2 mu m, with 1 dB bandwidth >= 35 nm. The design process of GC and meta-deflector is provided in detail, and the influence of fabrication error on the CE is analyzed.

Automated summary

We propose a vertical coupling scheme using metasurface deflectors and grating couplers. The genetic algorithm is used to optimize the grating couplers based on Gaussian fitting. An amorphous silicon-based meta-deflector is designed to achieve optimal coupling angle for high coupling efficiency. Simulations predict a peak vertical coupling efficiency of 78% at 2 μm wavelength, with a 1 dB bandwidth of at least 35 nm. The design process of grating couplers and meta-deflector is detailed, and the impact of fabrication error on coupling efficiency is analyzed.