期刊
PHOTONICS
卷 10, 期 6, 页码 -出版社
MDPI
DOI: 10.3390/photonics10060629
关键词
extreme ultraviolet laser; capillary discharge; focusing; wavefront splitting; tubular optical element
类别
This article introduces a capillary discharge extreme ultraviolet laser that is focused and wavefront split at 46.9 nm using a tubular optical element. The reflectivity at 46.9 nm is both simulated and measured to be higher than 90% with slight optical aberration. The operating principle of the tubular element for focusing and wavefront splitting is discussed. Dense and intense grating-like fringes with a period of about 150 nm are achieved. The method used in this work allows for nano-scale processing with extreme ultraviolet laser in single-shot exposure mode.
A capillary discharge extreme ultraviolet laser is focused and wavefront split at 46.9 nm by a tubular optical element. The reflectivity at 46.9 nm is both simulated and measured to be higher than 90% with a slight optical aberration. The operating principle of the tubular element for focusing and wavefront splitting is discussed. Dense and intense grating-like fringes with a period of similar to 150 nm are achieved. The method used in this work allows nano-scale processing with extreme ultraviolet laser at single-shot exposure mode.
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