期刊
NANOPHOTONICS
卷 12, 期 13, 页码 2603-2610出版社
WALTER DE GRUYTER GMBH
DOI: 10.1515/nanoph-2022-0784
关键词
compound semiconductor; light emitting diodes; metal-insulator-metal waveguides; photodetectors; spontaneous emission
We demonstrate the integration of active semiconductor materials into metal-insulator-metal (MIM) waveguides, enabling on-chip light generation and detection for nanoscale photonic platforms. The metal-semiconductor-metal section can function as a light emitting diode or a photodetector depending on its bias conditions. We experimentally verify the independent and combined operations of on-chip light sources and photodetectors.
We demonstrate heterogeneous integration of active semiconductor materials into the conventional passive metal-insulator-metal (MIM) waveguides to provide compact on-chip light generation and detection capabilities for chip-scale active nanophotonic platforms. Depending on its bias conditions, a metal-semiconductor-metal section can function as either a light emitting diode or a photodetector directly connected to the MIM waveguides. We experimentally verify the independent and combined operations of electrically-driven on-chip light sources and photodetectors.
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