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Process Development for Batch Production of Micro-Milling Tools Made of Silicon Carbide by Means of the Dry Etching Process

MICROMACHINES (2023)

Etching of SiC-SiC-composites by a laser-induced plasma in a reactive gas

Klaus Zimmer et al.

Summary: A gentle machining process for SiC-SiC material removal using laser-induced plasma was proposed and demonstrated, showing no mechanical damage to the composite structure. Different surface features were observed during the material removal process, suggesting that this method can be effective for various SiC-SiC applications.

CERAMICS INTERNATIONAL (2022)

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Article Engineering, Manufacturing

Precision micro-milling process: state of the art

Lorcan O'Toole et al.

Summary: Micro-milling is a precision manufacturing process that finds applications in various industries for its versatility and efficiency. Despite challenges posed by physical phenomena during micro-milling, through in-depth research and discussions, improvements can be made to enhance the overall process. Additionally, the combination of conventional micro-milling with other technologies shows promising potential in addressing issues related to physical process phenomena.

ADVANCES IN MANUFACTURING (2021)

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Article Optics