Temperature Performance Study of SAW Sensors Based on AlN and AlScN

In this paper, the temperature performance of AlN-SAW resonators and AlScN-SAW resonators is studied. They are simulated by COMSOL Multiphysics, and their modes and the S11 curve are analyzed. The two devices were fabricated using MEMS technology and tested using VNA, and the test results were consistent with the simulation results. Temperature experiments were carried out with temperature control equipment. With the change in temperature, the changes in S11 parameters, TCF coefficient, phase velocity, and quality factor Q were analyzed. The results show that the temperature performance of the AlN-SAW resonator and the AlScN-SAW resonator is very good, and both have good linearity. At the same time, the sensitivity of the AlScN-SAW resonator is greater by 9.5%, the linearity is greater by 15%, and the TCF coefficient is greater by 11.1%. The temperature performance is excellent, and it is more suitable as a temperature sensor.

Automated summary

The temperature performance of AlN-SAW resonators and AlScN-SAW resonators was studied in this paper. They were simulated using COMSOL Multiphysics, and their modes and S11 curve were analyzed. The two devices were fabricated using MEMS technology and tested using VNA, and the test results were consistent with the simulation results. Temperature experiments were conducted with temperature control equipment, and the changes in S11 parameters, TCF coefficient, phase velocity, and quality factor Q with temperature were analyzed. The results showed that both the AlN-SAW resonator and the AlScN-SAW resonator exhibited excellent temperature performance, with good linearity. Additionally, the AlScN-SAW resonator had a 9.5% higher sensitivity, 15% higher linearity, and 11.1% higher TCF coefficient. It is therefore more suitable as a temperature sensor.