4.6 Article

Room-Temperature CMOS Monolithic Resonant Triple-Band Terahertz Thermal Detector

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MICROMACHINES
卷 14, 期 3, 页码 -

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MDPI
DOI: 10.3390/mi14030627

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terahertz; multiband detector; CMOS; octagonal ring antenna

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This paper presents the operation principle, module designs, theoretical analysis, and experimental validation of a room-temperature CMOS monolithic resonant triple-band THz thermal detector. The detector consists of a compact triple-band octagonal ring antenna and a sensitive PTAT sensor, showing advantages of room-temperature operation, low cost, easy integration, and mass production. Good experimental results are obtained, providing great potential for multiband THz sensing and imaging systems.
Multiband terahertz (THz) detectors show great application potential in imaging, spectroscopy, and sensing fields. Thermal detectors have become a promising choice because they could sense THz radiations on the whole spectrum. This paper demonstrates the operation principle, module designs with in-depth theoretical analysis, and experimental validation of a room-temperature CMOS monolithic resonant triple-band THz thermal detector. The detector, which consists of a compact triple-band octagonal ring antenna and a sensitive proportional to absolute temperature (PTAT) sensor, has virtues of room-temperature operation, low cost, easy integration, and mass production. Good experimental results are obtained at 0.91 THz, 2.58 THz, and 4.2 THz with maximum responsivities of 32.6 V/W, 43.2 V/W, and 40 V/W, respectively, as well as NEPs of 1.28 mu W/Hz(0.5), 2.19 mu W/Hz(0.5), and 2.37 mu W/Hz(0.5), respectively, providing great potential for multiband THz sensing and imaging systems.

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