期刊
MICROMACHINES
卷 14, 期 4, 页码 -出版社
MDPI
DOI: 10.3390/mi14040798
关键词
microlens array; laser polymerisation; graphene oxide polariser; 3D printing
Microlens arrays (MLAs) were fabricated using a femtosecond direct laser write (fs-DLW) technique, allowing high-fidelity definition of 3D surfaces on IR transparent substrates. A graphene oxide (GO) grating acting as a linear polariser was also fabricated by fs-DLW. The MLAs and GO polarisers were characterised and their performance was simulated through numerical modelling with good agreement between experimental results and simulations.
Microlens arrays (MLAs) which are increasingly popular micro-optical elements in compact integrated optical systems were fabricated using a femtosecond direct laser write (fs-DLW) technique in the low-shrinkage SZ2080 (TM) photoresist. High-fidelity definition of 3D surfaces on IR transparent CaF2 substrates allowed to achieve similar to 50% transmittance in the chemical fingerprinting spectral region 2-5 mu m wavelengths since MLAs were only similar to 10 mu m high corresponding to the numerical aperture of 0.3 (the lens height is comparable with the IR wavelength). To combine diffractive and refractive capabilities in miniaturised optical setup, a graphene oxide (GO) grating acting as a linear polariser was also fabricated by fs-DLW by ablation of a 1 mu m-thick GO thin film. Such an ultra-thin GO polariser can be integrated with the fabricated MLA to add dispersion control at the focal plane. Pairs of MLAs and GO polarisers were characterised throughout the visible-IR spectral window and numerical modelling was used to simulate their performance. A good match between the experimental results of MLA focusing and simulations was achieved.
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