4.7 Article

Three-dimensional modeling and experimentation ofmicrofluidic devices driven by surface acoustic wave

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ULTRASONICS
卷 129, 期 -, 页码 -

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ELSEVIER
DOI: 10.1016/j.ultras.2022.106914

关键词

Surface acoustic wave; Improved limiting velocity method; The acoustic radiation force; The drag force

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In this study, a 3D model is presented to investigate the application of surface acoustic wave (SAW) technology in manipulating micro-nano particles. The distribution of acoustic pressure and acoustic streaming in a microchannel is studied using the improved limiting velocity method (ILVM). The motion of micro-particles of different diameters under the interaction of acoustic radiation force and drag force is simulated, showing that particles can move in three dimensions. These findings and methods are crucial for designing SAW microfluidic chips and precisely controlling particle motion.
Surface acoustic wave (SAW) technology is proving to be an effective tool for manipulating micro-nano particles. In this paper, we present a fully-coupled 3D model of standing SAW acoustofluidic devices for obtaining particle motion. The improved limiting velocity method (ILVM) was used to investigate the distribution of acoustic pressure and acoustic streaming in microchannel. The results show that the distribution of acoustic pressure and acoustic streaming on the piezoelectric substrate surface perpendicular to the acoustic wave propagation di-rection is inhomogeneous. The motion of micro-particles with diameters of 0.5-, 5-, and 10 mu m is then simulated to investigate the interaction of acoustic radiation force and drag force caused by pressure and acoustic streaming. We demonstrate that micro and nanoparticles can move in three dimensions when acoustic radiation force and acoustic streaming interact. This result and method are critical for designing SAW microfluidic chips and controlling particle motion precisely.

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