期刊
THIN SOLID FILMS
卷 773, 期 -, 页码 -出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.tsf.2023.139780
关键词
Thin film; Thermocouple; Indium tin oxide; Indium oxide; Radio -frequency magnetron sputtering
This paper studies the application of indium tin oxide (ITO) and indium oxide (In2O3) films in high-temperature thermocouples and strain gauges. ITO-In2O3 thermocouples were fabricated by magnetron sputtering. The electrical properties of air-annealed and two-step nitrogen-annealed thermocouples were compared.
The complex internal structure of the aero-engine and the high-temperature, high-pressure, and high-speed airflow make it difficult to measure the internal temperature. Indium tin oxide (ITO) and In2O3 films have been studied for their application in high-temperature thermocouples and strain gauges. Due to their large Seebeck coefficient and high-temperature stability, ceramic thin-film thermocouples are expected to be used at high-temperature measure. In this paper, ITO-In2O3 thermocouples were fabricated by magnetron sputtering. Besides, the electrical properties of the air-annealed and two-step nitrogen-annealed thermocouples were compared, including the repeatability of thermoelectric response after multiple thermal cycles and the drift rate during the high-temperature duration. The microstructure and electrical conductivity of both the as-deposited and post-annealed ceramic thin films were tested respectively. The result shows that the resitivity and See-beck coefficient of the thin films annealed in nitrogen is reduced, but the stability at high temperature is greatly improved.
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