期刊
SPECTROCHIMICA ACTA PART B-ATOMIC SPECTROSCOPY
卷 203, 期 -, 页码 -出版社
PERGAMON-ELSEVIER SCIENCE LTD
DOI: 10.1016/j.sab.2023.106659
关键词
Tantalum; TaO; Plasma chemistry; Optical emission spectroscopy; LIBS; Molecular formation
类别
We measured the time-resolved emission spectroscopic signatures of Ta, TaO, and TaN from a laser-produced plasma. Varying the O2/N2 percentages in the gaseous environment, we observed that Ta oxide emission is more prominent in later stages of plasma evolution, while strong atomic emission is present in the early stages in air. The emission intensity of TaO increases, and its peak intensity appears earlier with increasing O2 availability. Additionally, we found that the presence of O2 favors TaO formation over TaN in the plasma chemistry.
We report measurements of time-resolved Ta, TaO and TaN emission spectroscopic signatures from a laserproduced plasma. Plasmas were generated using 1064 nm, 6 ns pulses from an Nd:YAG laser focused onto a pure Ta metal target in a gaseous environment with varying percentages of O2/N2 for controlling gas-phase oxidation/plasma chemistry. Time-resolved analysis showed that Ta oxide emission is prominent at later times in plasma evolution, whereas strong atomic emission is present at early times in air. Emission spectral features as a function of O2 partial pressure showed that TaO emission intensity increases, while the peak intensity of TaO appears earlier with increasing O2 availability. We also report emission spectra of TaN, and show that plasma chemistry favors TaO formation instead of TaN when O2 is present in the environment.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据