期刊
SENSORS
卷 23, 期 5, 页码 -出版社
MDPI
DOI: 10.3390/s23052592
关键词
photoacoustic microscopy; MEMS; electrothermal micromirror; portable
In this paper, a portable photoacoustic microscopy (PAM) system based on a large stroke electrothermal micromirror is proposed to achieve high resolution and fast imaging. The crucial micromirror in the system allows for precise and efficient 2-axis control. The system exhibits advantages in image resolution and control accuracy, indicating significant potential in the field of facial angiography.
In this paper, a portable photoacoustic microscopy (PAM) system is proposed based on a large stroke electrothermal micromirror to achieve high resolution and fast imaging. The crucial micromirror in the system realizes a precise and efficient 2-axis control. Two different designs of electrothermal actuators with O and Z shape are evenly located around the four directions of mirror plate. With a symmetrical structure, the actuator realized single direction drive only. The finite element modelling of both two proposed micromirror has realized a large displacement over 550 mu m and the scan angle over +/- 30.43 degrees at 0-10 V DC excitation. In addition, the steady-state and transient-state response show a high linearity and quick response respectively, which can contribute to a fast and stable imaging. Using the Linescan model, the system achieves an effective imaging area of 1 mm x 3 mm in 14 s and 1 mm x 4 mm in 12 s for the O and Z types, respectively. The proposed PAM systems have advantages in image resolution and control accuracy, indicating a significant potential in the field of facial angiography.
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