期刊
SENSORS
卷 23, 期 12, 页码 -出版社
MDPI
DOI: 10.3390/s23125493
关键词
self-sensing; coil impedance measurement; magnetic actuation; Bi-axial tunable prism
We present a method for self-sensing a magnetically actuated prism, eliminating the need for additional sensors in a feedback loop. By determining the optimal measurement frequency and developing a combined actuation and measurement driver, we demonstrate accurate measurement of the prism's tilt angle with an accuracy of +/-0.1 degrees in the polar angle and +/-20 mrad in the azimuthal angle.
We demonstrate a method for self-sensing of a magnetically actuated prism that can be used, e.g., in a feedback-loop without the need of additional sensors. In order to use the impedance of the actuation coils as a measurement parameter, we first obtained the optimal measurement frequency that is well separated from the actuation frequencies and at the same time provides the best compromise between sensitivity to the position and robustness. We then developed a combined actuation and measurement driver, and correlated its output signal to the mechanical state of the prism using a defined calibration sequence. We demonstrate that we can reliably measure the state of each actuator and determine the tilt angle of the prism with an accuracy of +/-0.1 degrees in the polar angle over a range of +/- 4 degrees and +/-20 mrad in the azimuthal angle.
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