4.6 Article

Hydrogen Gas Sensing Properties of Mixed Copper-Titanium Oxide Thin Films

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SENSORS
卷 23, 期 8, 页码 -

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MDPI
DOI: 10.3390/s23083822

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mixed copper-titanium oxides; Cu2O; TiO2; (CuTi)Ox; hydrogen gas sensing; thin films; magnetron sputtering

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Hydrogen is a clean energy source, but safety concerns arise due to its explosive nature at high concentrations. To meet the need for reliable monitoring systems, this study investigated mixed copper-titanium oxide thin films as hydrogen sensing materials. The films showed a sensor response to hydrogen at a low operating temperature without additional catalysts. The best response and sensitivity were found in films with similar atomic concentrations of copper and titanium.
Hydrogen is an efficient source of clean and environmentally friendly energy. However, because it is explosive at concentrations higher than 4%, safety issues are a great concern. As its applications are extended, the need for the production of reliable monitoring systems is urgent. In this work, mixed copper-titanium oxide ((CuTi)Ox) thin films with various copper concentrations (0-100 at.%), deposited by magnetron sputtering and annealed at 473 K, were investigated as a prospective hydrogen gas sensing material. Scanning electron microscopy was applied to determine the morphology of the thin films. Their structure and chemical composition were investigated by X-ray diffraction and X-ray photoelectron spectroscopy, respectively. The prepared films were nanocrystalline mixtures of metallic copper, cuprous oxide, and titanium anatase in the bulk, whereas at the surface only cupric oxide was found. In comparison to the literature, the (CuTi)Ox thin films already showed a sensor response to hydrogen at a relatively low operating temperature of 473 K without using any extra catalyst. The best sensor response and sensitivity to hydrogen gas were found in the mixed copper-titanium oxides containing similar atomic concentrations of both metals, i.e., 41/59 and 56/44 of Cu/Ti. Most probably, this effect is related to their similar morphology and to the simultaneous presence of Cu and Cu2O crystals in these mixed oxide films. In particular, the studies of surface oxidation state revealed that it was the same for all annealed films and consisted only of CuO. However, in view of their crystalline structure, they consisted of Cu and Cu2O nanocrystals in the thin film volume.

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