Design and Analysis of a Fluid-Filled RF MEMS Switch

Article Engineering, Mechanical

Event-driven MEMS vibration sensor: Integration of triboelectric nanogenerator and low-frequency switch

Mohammad Mousavi et al.

Summary: This paper introduces an event-driven vibration sensor that converts ambient vibrations into voltage using a triboelectric-nanogenerator (TENG) to drive a MEMS switch. Experimental results show that the MEMS-TENG can supply the MEMS switch with a good signal-to-noise ratio, sensitivity, and accuracy.

MECHANICAL SYSTEMS AND SIGNAL PROCESSING (2023)

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Article Engineering, Electrical & Electronic

New pull-in voltage modelling of step structure RF MEMS switch

K. Girija Sravani et al.

Summary: This paper presents a closed-form model for pull-in voltage in RF MEMS switches derived from the capacitance generated during ON and OFF conditions. The model, which includes the ligament efficiency term, is validated by comparing simulated and modeled values. A specific switch with certain dimensions and materials shows a very low error percentage, making it the best choice for the proposed step structure RF MEMS switch.

MICROELECTRONICS JOURNAL (2021)

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Article Engineering, Electrical & Electronic