☆ 4.5 Article

Numerical modeling of gas-phase reactions of tetraethoxysilane/O2/Ar atmospheric dielectric barrier discharge for deposition

PLASMA PROCESSES AND POLYMERS (2023)

相关参考文献

注意：仅列出部分参考文献，下载原文获取全部文献信息。

Article Engineering, Electrical & Electronic

Global model of plasma-activated water over long time scale: Pulsed discharge and afterglow

Wenjun Ning et al.

Summary: This study investigates the chemical properties of PAW produced by a dielectric barrier discharge driven by nanosecond voltage pulses, focusing on the production and consumption of reactive oxygen/nitrogen species. It also examines the effects of applied voltage and gap distance on RONS, showing that gaseous RONS are more sensitive to the gap distance while aqueous RONS are more sensitive to voltage amplitude. The results suggest the possibility of independently regulating gaseous and aqueous chemistry.

HIGH VOLTAGE (2023)

添加到收藏夹

Article Physics, Fluids & Plasmas

Effects of O2 addition on the plasma uniformity and reactivity of Ar DBD excited by ns pulsed and AC power supplies

Feng Liu et al.

Summary: The addition of O-2 to DBDs has different effects on discharge uniformity and characteristics under different conditions, with ns pulsed DBD showing better uniformity than AC DBD. Although O-2 causes spatial electric field distortion in ns pulsed DBD, it can reduce filament intensity in AC DBD. In addition, ns pulsed DBD has higher instantaneous power and energy efficiency compared to AC DBD.

PLASMA SCIENCE & TECHNOLOGY (2022)

添加到收藏夹

Article Food Science & Technology

In-package plasma: From reactive chemistry to innovative food preservation technologies

Renwu Zhou et al.

Summary: This review provides insights into the in-package plasma technology for food preservation. It has been shown that in-package plasma is effective in sterilization, maintaining food quality, and preventing cross-contamination. Recommendations are made to overcome its limitations, such as using oxygen-reduced atmospheres and advanced biopolymer materials.

TRENDS IN FOOD SCIENCE & TECHNOLOGY (2022)

添加到收藏夹

Article Engineering, Electrical & Electronic

Study on discharge characteristics and improving surface hydrophobicity of epoxy resin by nanosecond pulse excited argon/hexamethyldisiloxane jet array

Zhiyan Liu et al.

Summary: In this paper, a one-dimensional argon jet array driven by nanosecond pulse power supply with hexamethyldisiloxane (HMDSO) addition was used to form a super-hydrophobic film on the surface of epoxy resin, aiming to improve the surface hydrophobicity and insulating performance of insulating materials. The experimental results showed that with 0.04% HMDSO, the jet array achieved the best hydrophobic treatment effect on the epoxy resin surface. The apparent contact angle of the epoxy resin surface increased from 60.3 degrees to 150.0 degrees after 60 seconds of treatment, and the wettability did not change significantly beyond 60 seconds of treatment time. The surface morphology and chemical feature of the treated epoxy resin were analyzed, revealing that the surface was covered with dense coral-like particles in nanoscales, and the original organic functional groups were replaced by silicon-containing groups, resulting in an increase in the Si content from 0.4% to 28.0%. This study provides important references for the development of jet array as an efficient tool to enhance the surface hydrophobicity and insulating performance of insulating materials.

HIGH VOLTAGE (2022)

添加到收藏夹

Review Engineering, Electrical & Electronic

Review of interface tailoring techniques and applications to improve insulation performance

Mingxiao Zhu et al.

Summary: Interfaces between different materials are essential in high-voltage insulation systems, and targeted tailoring of interfacial properties is considered an effective approach to enhance insulation properties. This article reviews recent progress in interface tailoring methods and their application to improve various insulation properties, discussing potential application scenarios and desired insulation properties. Classification of interface tailoring methods, including physical/chemical surface modification and surface coating, is provided, along with a discussion on structure-property relationships and future development prospects.

HIGH VOLTAGE (2022)

添加到收藏夹

Article Materials Science, Multidisciplinary

Joining SiO 2 based ceramics: recent progress and perspectives

Haohan Wang et al.

Summary: The review article summarizes the recent research and development trends of joining technologies for SiO2 based ceramics. It discusses widely used joining technologies, joining mechanisms, current research progress, and suitable applications. Laser welding, anodic bonding, wafer bonding, and brazing are discussed in detail. The wetting mechanism, residual stress control, interfacial microstructure, and mechanical performance of brazing are elaborated deeply. The review also proposes future development trends of SiO2 ceramics joining.

JOURNAL OF MATERIALS SCIENCE & TECHNOLOGY (2022)

添加到收藏夹

Article Physics, Applied

Surface-induced gas-phase redistribution effects in plasma-catalytic dry reforming of methane: numerical investigation by fluid modeling

Mingrui Zhu et al.

Summary: Plasma catalysis is an emerging technology for decarbonization in industries. This study investigates the effect of surface reactions on a platinum catalyst on the redistribution of gas-phase particles in plasma-catalytic dry reforming of methane. The results show that the catalyst not only directly influences the plasma chemistry, but also indirectly affects the spatial distributions of active species, which goes beyond the existing state-of-the-art approaches.

JOURNAL OF PHYSICS D-APPLIED PHYSICS (2022)

添加到收藏夹

Article Engineering, Chemical

Open-air plasma deposition of polymer-supported silica-based membranes for

Mitsugu Kawasaki et al.

Summary: In this study, an open-air atmospheric-pressure plasma-enhanced chemical vapor deposition (APPECVD) technique was developed to fabricate polymer-supported silica-based membranes for gas separation. The technique demonstrated scalability and high productivity.

SEPARATION AND PURIFICATION TECHNOLOGY (2022)

添加到收藏夹

Article Physics, Applied

The 2022 Plasma Roadmap: low temperature plasma science and technology

I Adamovich et al.

Summary: The 2022 Roadmap is a publication that aims to identify important challenges in the field of low-temperature plasma (LTP) physics and technology. It includes visions from 41 leading experts representing 21 countries and five continents, with a focus on new topics and areas of interest in the field. The roadmap is expected to contribute to the continued development of LTP science and technology in the next 5-10 years.

JOURNAL OF PHYSICS D-APPLIED PHYSICS (2022)

添加到收藏夹

Article Engineering, Chemical

Modeling of Atmospheric-Pressure Dielectric Barrier Discharges in Argon with Small Admixtures of Tetramethylsilane

Detlef Loffhagen et al.

Summary: A time-dependent, spatially one-dimensional fluid-Poisson model is applied to analyze the impact of small amounts of tetramethylsilane (TMS) as precursor on the discharge characteristics of an atmospheric-pressure dielectric barrier discharge (DBD) in argon. The modeling results show that TMS is depleted during the residence time of the plasma in the DBD, where the percentage consumption of TMS decreases with increasing TMS fraction.

PLASMA CHEMISTRY AND PLASMA PROCESSING (2021)

添加到收藏夹

Article Physics, Applied

Studying the plasma-assisted polymerization at atmospheric pressure in Ar/TEOS by active laser diagnostics

Federica Barletta et al.

Summary: This study investigates the key processes in an atmospheric-pressure plasma jet containing Ar and tetraethyl orthosilicate (TEOS) through imaging and fluorescence spectroscopy of important discharge radicals. It focuses on the behavior of ground-state radicals' density with respect to applied voltage and Ar/TEOS mixing ratio, providing initial insights on precursor fragmentation mechanisms. The influence of precursor admixture and fragmentation on the kinetics of OH, CH radicals, and atomic oxygen is revealed.

PLASMA PROCESSES AND POLYMERS (2021)

添加到收藏夹

Article Physics, Applied

Uniform and stable plasma reactivity: Effects of nanosecond pulses and oxygen addition in atmospheric-pressure dielectric barrier discharges

Feng Liu et al.

Summary: The uniformity and reactivity of DBDs can be improved by using customized nanosecond pulse excitation and precise addition of oxygen to the Ar flow. Increasing gap voltage U-g facilitates electron avalanches and improves discharge uniformity, while a small amount of added oxygen favors electron production.

JOURNAL OF APPLIED PHYSICS (2021)

添加到收藏夹

Article Nanoscience & Nanotechnology

Nano-sized composite improving the insulating performance of insulating paper using low-temperature plasmas

Shilin Wu et al.

Summary: By depositing SiO2 nanoparticles on ceramic fiber-reinforced insulating paper using PECVD, the surface flashover voltage of the insulating paper was significantly increased, leading to improved dielectric strength and inhibiting charge accumulation, which has the potential to enhance the insulating properties of other dielectric materials.

NANOTECHNOLOGY (2021)

添加到收藏夹

Article Physics, Applied

Influence of double bonds and cyclic structure on the AP-PECVD of low-k organosilicon insulating layers

Dominique Abessolo Ondo et al.

Summary: The study reveals that the structure of the monomer affects the growth mechanisms and performance of thin films prepared from different tetrasiloxane compounds. The presence of vinyl bonds enables free-radical polymerization and surface reaction pathways, leading to the formation of atomically smooth thin films with excellent insulating properties under specific plasma conditions.

PLASMA PROCESSES AND POLYMERS (2021)

添加到收藏夹

Article Materials Science, Multidisciplinary

The influence of temperature on the intrinsic transport properties of water in inorganic and polymeric coatings

Sandra Kiese et al.

Summary: The research focused on the behavior of water vapor permeation in multilayer barrier films, showing that the temperature dependency of steady-state permeation is determined by SiOx's E-p, while the lag time is mainly influenced by the heat of sorption of the intermediate polymeric layer. The increase in water vapor transmission rate is dominated by the partial pressure change with increasing temperature.

THIN SOLID FILMS (2021)

添加到收藏夹

Article Materials Science, Multidisciplinary

Environmental reliability and moisture barrier properties of silicon nitride and silicon oxide films using roll-to-roll plasma enhanced chemical vapor deposition

Won Jae Lee et al.

Summary: This study investigated the stability and degradation mechanism of SiNx and SiOx flexible barrier films under high temperature and high humidity conditions using water vapor transmission rate (WVTR) measurements and cyclic bending tests. The SiOx film exhibited faster oxidation and more significant degradation in barrier performance compared to the SiNx film, especially under environmental conditions of 85 degrees C/85% relative humidity. The SiNx film showed stable barrier performance even after harsh environmental reliability tests, including 10,000 cycles of bending at a fixed radius of 10 mm.

THIN SOLID FILMS (2021)

添加到收藏夹

Article Physics, Applied

Insights into plasma-assisted polymerization at atmospheric pressure by spectroscopic diagnostics

Federica Barletta et al.

PLASMA PROCESSES AND POLYMERS (2020)

添加到收藏夹

Article Physics, Applied

Maskless atmospheric pressure PECVD of SiOx films on both planar and nonplanar surfaces using a flexible atmospheric microplasma generation device

Tao Wang et al.

PLASMA PROCESSES AND POLYMERS (2020)

添加到收藏夹

Article Physics, Applied

Large-area atmospheric pressure dielectric barrier discharges in Ar-HMDSO mixtures: Experiments and fluid modelling

Detlef Loffhagen et al.

PLASMA PROCESSES AND POLYMERS (2020)

添加到收藏夹

Article Physics, Applied

Particle formation during deposition of SiOx nanostructured thin films by atmospheric pressure plasma jet

Y. A. Ussenov et al.

JAPANESE JOURNAL OF APPLIED PHYSICS (2020)

添加到收藏夹

Article Physics, Applied

The 2020 plasma catalysis roadmap

Annemie Bogaerts et al.

JOURNAL OF PHYSICS D-APPLIED PHYSICS (2020)

添加到收藏夹

Article Materials Science, Multidisciplinary

TEOS-based low-pressure chemical vapor deposition for gate oxides in 4H-SiC MOSFETs using nitric oxide post-deposition annealing

Jeong Hyun Moon et al.

CURRENT APPLIED PHYSICS (2020)

添加到收藏夹

Article Chemistry, Physical

Understanding the dynamic growth environment of silicon dioxide in atmospheric pressure plasma using multiphysics modeling

Arash Samaei et al.

SURFACES AND INTERFACES (2020)

添加到收藏夹

Article Materials Science, Multidisciplinary

Surface Modification of Ethylene Propylene Diene Terpolymer Rubber by Plasma Polymerization Using Organosilicon Precursors

Christian W. Karl et al.

ACS APPLIED POLYMER MATERIALS (2020)

添加到收藏夹

Article Physics, Applied

Characteristics and mechanisms of transition from filament to homogeneous glow in atmospheric helium dielectric barrier discharges under variation of the applied voltage amplitude

Qiao Wang et al.

JOURNAL OF PHYSICS D-APPLIED PHYSICS (2019)

添加到收藏夹

Article Physics, Applied

Computational study on silicon oxide plasma enhanced chemical vapor deposition (PECVD) process using tetraethoxysilane/oxygen/argon/ helium

Hu Li et al.

JAPANESE JOURNAL OF APPLIED PHYSICS (2019)

添加到收藏夹

Article Physics, Applied

Dissociative reactions induced by electron impact and electron transport in TEOS vapor

Satoru Kawaguchi et al.

JAPANESE JOURNAL OF APPLIED PHYSICS (2019)

添加到收藏夹

Article Physics, Fluids & Plasmas

A numerical analysis of a microwave induced coaxial surface wave discharge fed with a mixture of oxygen and hexamethyldisiloxane for the purpose of deposition

Efe Kemaneci et al.

PLASMA SOURCES SCIENCE & TECHNOLOGY (2019)

添加到收藏夹

Article Energy & Fuels

Comparative study of different silicon oxides used as interfacial passivation layer (SiNy:H/SiOx/n+-Si) in industrial monocrystalline silicon solar cells

Tarun Singh Yadav et al.

SOLAR ENERGY MATERIALS AND SOLAR CELLS (2019)

添加到收藏夹

Article Physics, Applied

Influence of nitrogen impurities on the performance of multiple-current-pulse behavior in a homogeneous helium dielectric-barrier discharge at atmospheric pressure

Yuhui Zhang et al.

JOURNAL OF PHYSICS D-APPLIED PHYSICS (2019)

添加到收藏夹

Article Physics, Fluids & Plasmas

Manipulating the discharge pulse number in an atmospheric helium dielectric barrier discharge with multiple current pulses per half cycle

Yuhui Zhang et al.

PLASMA SOURCES SCIENCE & TECHNOLOGY (2019)

添加到收藏夹

Article Physics, Fluids & Plasmas

Two-dimensional simulation of the evolution of radial discharge columns in an atmospheric argon dielectric barrier discharge

Jing Wan et al.

PHYSICS OF PLASMAS (2019)

添加到收藏夹

Article Physics, Fluids & Plasmas

Deposition of SiCxHyOz thin film on epoxy resin by nanosecond pulsed APPJ for improving the surface insulating performance

Qing Xie et al.

PLASMA SCIENCE & TECHNOLOGY (2018)

添加到收藏夹

Article Chemistry, Physical

Modeling Plasma-based CO2 and CH4 Conversion in Mixtures with N2, O2, and H2O: The Bigger Plasma Chemistry Picture

Weizong Wang et al.

JOURNAL OF PHYSICAL CHEMISTRY C (2018)

添加到收藏夹

Article Physics, Applied

Modelling of plasma-based dry reforming: how do uncertainties in the input data affect the calculation results?

Weizong Wang et al.

JOURNAL OF PHYSICS D-APPLIED PHYSICS (2018)

添加到收藏夹

Article Nanoscience & Nanotechnology

Rolled-up SiOx/SiNx microtubes with an enhanced quality factor for sensitive solvent sensing

Pengfei Song et al.

NANOTECHNOLOGY (2018)

添加到收藏夹

Article Chemistry, Physical

Surface modifications of polystyrene and their stability: A comparison of DBD plasma deposition and direct fluorination

Fei Kong et al.

APPLIED SURFACE SCIENCE (2018)

添加到收藏夹

Article Chemistry, Multidisciplinary

Polymer Dielectrics: A Scalable, High-Throughput, and Environmentally Benign Approach to Polymer Dielectrics Exhibiting Significantly Improved Capacitive Performance at High Temperatures (Adv. Mater. 49/2018)

Yao Zhou et al.

ADVANCED MATERIALS (2018)

添加到收藏夹

Review Physics, Fluids & Plasmas

Foundations of modelling of nonequilibrium low-temperature plasmas

L. L. Alves et al.

PLASMA SOURCES SCIENCE & TECHNOLOGY (2018)

添加到收藏夹

Article Physics, Fluids & Plasmas

Impact of hexamethyldisiloxane admixtures on the discharge characteristics of a dielectric barrier discharge in argon for thin film deposition

Detlef Loffhagen et al.

CONTRIBUTIONS TO PLASMA PHYSICS (2018)

添加到收藏夹

Review Physics, Applied

Concepts, Capabilities, and Limitations of Global Models: A Review

Andrew Hurlbatt et al.

PLASMA PROCESSES AND POLYMERS (2017)

添加到收藏夹

Article Physics, Applied

Inorganic nanofilms for surface charge control on polymer surfaces by atmospheric-pressure plasma deposition

Ruixue Wang et al.

JOURNAL OF APPLIED PHYSICS (2017)

添加到收藏夹

Review Physics, Applied

The 2017 Plasma Roadmap: Low temperature plasma science and technology

I. Adamovich et al.

JOURNAL OF PHYSICS D-APPLIED PHYSICS (2017)

添加到收藏夹

Article Physics, Applied

Thin insulating film deposition on copper by atmospheric-pressure plasmas

Ruixue Wang et al.

PLASMA PROCESSES AND POLYMERS (2017)

添加到收藏夹

Article Physics, Applied

Plasma surface treatment to improve surface charge accumulation and dissipation of epoxy resin exposed to DC and nanosecond-pulse voltages

Cheng Zhang et al.

JOURNAL OF PHYSICS D-APPLIED PHYSICS (2017)

添加到收藏夹

Article Physics, Applied

A global model of cylindrical and coaxial surface-wave discharges

Efe Kemaneci et al.

JOURNAL OF PHYSICS D-APPLIED PHYSICS (2017)

添加到收藏夹

Article Physics, Fluids & Plasmas

Electron collision cross section sets of TMS and TEOS vapours

S. Kawaguchi et al.

PLASMA SOURCES SCIENCE & TECHNOLOGY (2017)

添加到收藏夹

Article Physics, Fluids & Plasmas

Main species and chemical pathways in cold atmospheric-pressure Ar + H2O plasmas

Dingxin Liu et al.

PLASMA SOURCES SCIENCE & TECHNOLOGY (2017)

添加到收藏夹

Article Physics, Applied

Modelling of plasma generation and thin film deposition by a non-thermal plasma jet at atmospheric pressure

F. Sigeneger et al.

JOURNAL OF PHYSICS D-APPLIED PHYSICS (2016)

添加到收藏夹

Article Physics, Applied

Spectroscopic studies of microwave plasmas containing hexamethyldisiloxane

A. S. C. Nave et al.

JOURNAL OF PHYSICS D-APPLIED PHYSICS (2016)

添加到收藏夹

Article Spectroscopy

Characterization of the large area plane-symmetric low-pressure DC glow discharge

S. Avtaeva et al.

SPECTROCHIMICA ACTA PART B-ATOMIC SPECTROSCOPY (2016)

添加到收藏夹

Article Chemistry, Multidisciplinary

Electron induced chemistry for acetaldehyde

Minaxi Vinodkumar et al.

RSC ADVANCES (2015)

添加到收藏夹

Article Physics, Applied

Towards Roll-to-Roll Deposition of High Quality Moisture Barrier Films on Polymers by Atmospheric Pressure Plasma Assisted Process

Sergey A. Starostin et al.

PLASMA PROCESSES AND POLYMERS (2015)

添加到收藏夹

Article Optics

Electron-impact excitation of argon at intermediate energies

Oleg Zatsarinny et al.

PHYSICAL REVIEW A (2014)

添加到收藏夹

Article Astronomy & Astrophysics

The UMIST database for astrochemistry 2012

D. McElroy et al.

ASTRONOMY & ASTROPHYSICS (2013)

添加到收藏夹

Article Materials Science, Ceramics

The effect of TEOS plasma parameters on the silicon dioxide deposition mechanisms

Marzieh Abbasi-Firouzjah et al.

JOURNAL OF NON-CRYSTALLINE SOLIDS (2013)

添加到收藏夹

Article Chemistry, Physical

Plasma-Based Dry Reforming: A Computational Study Ranging from the Nanoseconds to Seconds Time Scale

Ramses Snoeckx et al.

JOURNAL OF PHYSICAL CHEMISTRY C (2013)

添加到收藏夹

Article Astronomy & Astrophysics

A KINETIC DATABASE FOR ASTROCHEMISTRY (KIDA)

V. Wakelam et al.

ASTROPHYSICAL JOURNAL SUPPLEMENT SERIES (2012)

添加到收藏夹

Review Physics, Applied

Atmospheric Pressure Low Temperature Direct Plasma Technology: Status and Challenges for Thin Film Deposition

Francoise Massines et al.

PLASMA PROCESSES AND POLYMERS (2012)

添加到收藏夹

Review Materials Science, Multidisciplinary

Atmospheric plasmas for thin film deposition: A critical review

Delphine Merche et al.

THIN SOLID FILMS (2012)

添加到收藏夹

Article Physics, Applied

Electron Transport Properties in HSi(OC2H5)3 Vapor

Kosaku Yoshida et al.

JAPANESE JOURNAL OF APPLIED PHYSICS (2011)

添加到收藏夹

Article Physics, Applied

Local deposition of SiOx plasma polymer films by a miniaturized atmospheric pressure plasma jet (APPJ)

J. Schaefer et al.

JOURNAL OF PHYSICS D-APPLIED PHYSICS (2008)

添加到收藏夹

Article Chemistry, Physical

Electron and ion reactions with hexamethyldisiloxane and pentamethyldisiloxane

S. Carles et al.

JOURNAL OF CHEMICAL PHYSICS (2007)

添加到收藏夹

Article Physics, Applied

Global model of a low pressure ECR microwave plasma applied to the PECVD of SiO2 thin films

A. Yanguas-Gil et al.

JOURNAL OF PHYSICS D-APPLIED PHYSICS (2007)

添加到收藏夹

Article Physics, Fluids & Plasmas

Solving the Boltzmann equation to obtain electron transport coefficients and rate coefficients for fluid models

GJM Hagelaar et al.

PLASMA SOURCES SCIENCE & TECHNOLOGY (2005)

添加到收藏夹

Article Materials Science, Coatings & Films

Growth mechanisms of SiO2 thin films prepared by plasma enhanced chemical vapour deposition

A Yanguas-Gil et al.

SURFACE & COATINGS TECHNOLOGY (2005)

添加到收藏夹

Article Physics, Fluids & Plasmas

Collision processes of C2,3Hy and C2,3Hy+ hydrocarbons with electrons and protons

RK Janev et al.

PHYSICS OF PLASMAS (2004)

添加到收藏夹

Review Physics, Applied

A review of plasma-surface interactions during processing of polymeric materials measured using the IRIS technique

ER Fisher

PLASMA PROCESSES AND POLYMERS (2004)

添加到收藏夹

Article Physics, Fluids & Plasmas

Collision processes of CHy and CHy+ hydrocarbons with plasma electrons and protons

RK Janev et al.

PHYSICS OF PLASMAS (2002)

添加到收藏夹

Article Physics, Applied

Mass spectrometric investigation of the positive ions formed in low-pressure oxygen/tetraethoxysilane and argon/tetraethoxysilane plasmas

K Aumaille et al.

JOURNAL OF APPLIED PHYSICS (2001)

添加到收藏夹

Article Electrochemistry

Modeling of silicon dioxide chemical vapor deposition from tetraethoxysilane and ozone

S Romet et al.

JOURNAL OF THE ELECTROCHEMICAL SOCIETY (2001)

添加到收藏夹

Article Physics, Fluids & Plasmas

Study of oxygen/tetraethoxysilane plasmas in a helicon reactor using optical emission spectroscopy and mass spectrometry

K Aumaille et al.

PLASMA SOURCES SCIENCE & TECHNOLOGY (2000)

添加到收藏夹

Article Materials Science, Multidisciplinary

Chemical kinetics in chemical vapor deposition: growth of silicon dioxide from tetraethoxysilane (TEOS)

ME Coltrin et al.

THIN SOLID FILMS (2000)

添加到收藏夹

© Peeref 2019-2024. All rights reserved.