☆ 4.6 Article

Periodic surface structure of 4H-SiC by 46.9 nm laser

OPTICS EXPRESS (2023)

相关参考文献

注意：仅列出部分参考文献，下载原文获取全部文献信息。

Article Optics

Removal of SiC at atomic and close-to-atomic scale by nanosecond ultraviolet laser

Haojie An et al.

Summary: This paper explores the removal of SiC material at atomic and close-to-atomic scale using nanosecond ultraviolet laser under ambient condition. The mechanisms are investigated through heat conduction model, reactive molecular dynamics simulation, and single shot irradiation experiments. Experimental results yield a threshold fluence of 2.52 J/cm2, and distinctive behaviors such as modification and atomic layer exfoliation at near-threshold fluence are analyzed using atom force microscopy. The results show that the chemical composition modification varies with depth due to changes in oxygen content. Moreover, both surface modification and material removal can occur at the scale of a single atomic layer, offering a promising manufacturing approach for achieving ultimate precision for materials.

OPTICS AND LASER TECHNOLOGY (2023)

添加到收藏夹

Article Chemistry, Physical

Study on surface thermal oxidation of silicon carbide irradiated by pulsed laser using reactive molecular dynamics

Haojie An et al.

Summary: This study investigates the oxidation mechanism of 4H-SiC in oxygen and water at different temperatures using reactive force field molecular dynamics. The results show that laser-induced thermal oxidation is a complex process involving interactions among H, C, O, and Si atoms. The revealed mechanism provides theoretical guidance for high-quality processing of 4H-SiC at atomic and close-to-atomic scales.

JOURNAL OF CHEMICAL PHYSICS (2023)

添加到收藏夹

Article Engineering, Electrical & Electronic

Material removal on silicon towards atomic and close-to-atomic scale by infrared femtosecond laser

Haojie An et al.

Summary: In this paper, the authors study the material removal of silicon using ultrashort laser pulse and reveal the multiphoton ionization mechanism through molecular dynamics simulation. The minimum material removal thickness is found to be as small as 1 nm. It is found that laser-induced plasma plays a crucial role in the interaction process, leading to the formation of an ablation crater and an outer rim due to recoil pressure.

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING (2023)

添加到收藏夹

Article Engineering, Manufacturing

Material removal at atomic and close-to-atomic scale by high-energy photon: a case study using atomistic-continuum method

Hao-Jie An et al.

Summary: This paper studies the interaction of a femtosecond EUV pulse with monocrystalline silicon using molecular dynamics coupled with a two-temperature model. It discusses dynamical processes under various fluencies, emphasizing the impact of photoionization and bond breakage on atom desorption, and explores the possibility of single atomic layer removal.

ADVANCES IN MANUFACTURING (2022)

添加到收藏夹

Article Computer Science, Interdisciplinary Applications

LAMMPS-a flexible simulation tool for particle-based materials modeling at the atomic, meso, and continuum scales

Aidan P. Thompson et al.

Summary: LAMMPS, a classical molecular dynamics simulator released as an open source code in 2004, has gained popularity for its wide variety of particle interaction models, platform compatibility, and user control over simulation details. With contributions from numerous developers, it has grown from 50,000 lines of code to a million today, showcasing new capabilities like dynamic load balancing and quantum-accuracy machine learning interatomic potentials.

COMPUTER PHYSICS COMMUNICATIONS (2022)

添加到收藏夹

Article Engineering, Industrial

The three paradigms of manufacturing advancement

Fengzhou Fang

JOURNAL OF MANUFACTURING SYSTEMS (2022)

添加到收藏夹

Article

Toward Single-Atomic-Layer Lithography on Highly Oriented Pyrolytic Graphite Surfaces Using AFM-Based Electrochemical Etching

Wei Han et al.

Nanomanufacturing and Metrology (2022)

添加到收藏夹

Article

Advances in Atomic Layer Deposition

Jingming Zhang et al.

Nanomanufacturing and Metrology (2022)

添加到收藏夹

Article Materials Science, Coatings & Films

Crystal cleavage, periodic nanostructure and surface modification of SiC ablated by femtosecond laser in different media

Chen Wu et al.

Summary: This study utilized femtosecond laser to etch SiC and investigated the microscopic mechanism of carrier concentration and temperature change. Results showed that the ablation threshold was related to laser pulse number and processing medium, and a mechanism model based on cleavage phenomenon was established. The processing media significantly affected the surface roughness and chemical bond characteristics of SiC.

SURFACE & COATINGS TECHNOLOGY (2021)

添加到收藏夹

Article

Study on Mechanisms of Photon-Induced Material Removal on Silicon at Atomic and Close-to-Atomic Scale

Peizhi Wang et al.

Nanomanufacturing and Metrology (2021)

添加到收藏夹

Article Physics, Applied

Molecular dynamics simulations of ultrafast radiation induced melting at metal-semiconductor interfaces

Ashwin Ravichandran et al.

Summary: Metal-semiconductor contacts in silicon carbide diodes experience melting, recrystallization, and permanent amorphization at the interface when exposed to harsh radiation environments. Molecular simulations show tungsten near the radiation track undergoes melting, with most of it recrystallizing with noticeable undercooling, while SiC becomes permanently amorphous. Local undercooling in tungsten films can impact device performance before bulk melting temperature is reached, and high temperatures can cause interface fracture-like failure. These findings are crucial for understanding diverse failure modes in SiC diode materials.

JOURNAL OF APPLIED PHYSICS (2021)

添加到收藏夹

Article Chemistry, Multidisciplinary

Mechanical Properties of Vacancy Tuned Carbon Honeycomb

Lu Xie et al.

NANOMATERIALS (2019)

添加到收藏夹

Article Nanoscience & Nanotechnology

Anisotropic and temperature dependent mechanical properties of carbon honeycomb

Qin Qin et al.

NANOTECHNOLOGY (2019)

添加到收藏夹

Review Chemistry, Multidisciplinary

Laser-Processed Nanosilicon: A Multifunctional Nanomaterial for Energy and Healthcare

Andrei V. Kabashin et al.

ACS NANO (2019)

添加到收藏夹

Article Physics, Multidisciplinary

Controlled strong excitation of silicon as a step towards processing materials at sub-nanometer precision

Thanh-Hung Dinh et al.

COMMUNICATIONS PHYSICS (2019)

添加到收藏夹

Article Physics, Applied

Low damage electrical modification of 4H-SiC via ultrafast laser irradiation

Minhyung Ahn et al.

JOURNAL OF APPLIED PHYSICS (2018)

添加到收藏夹

Article Instruments & Instrumentation

A table-top EUV focusing optical system with high energy density using a modified Schwarzschild objective and a laser-plasma light source

Zhe Zhang et al.

REVIEW OF SCIENTIFIC INSTRUMENTS (2018)

添加到收藏夹

Article Nanoscience & Nanotechnology

Craters and nanostructures on BaF2 sample induced by a focused 46.9nm laser

Huaiyu Cui et al.

AIP ADVANCES (2017)

添加到收藏夹

Article Chemistry, Physical

Formation of nanostructures induced by capillary-discharge soft X-ray laser on BaF2 surfaces

Yongpeng Zhao et al.

APPLIED SURFACE SCIENCE (2017)

添加到收藏夹

Article Materials Science, Multidisciplinary

SiC absorption of near-infrared laser radiation at high temperatures

B. Adelmann et al.

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING (2016)

添加到收藏夹

Article Optics

Atomically thin optical lenses and gratings

Jiong Yang et al.

LIGHT-SCIENCE & APPLICATIONS (2016)

添加到收藏夹

Article Physics, Applied

Characterization of material ablation driven by laser generated intense extreme ultraviolet light

Nozomi Tanaka et al.

APPLIED PHYSICS LETTERS (2015)

添加到收藏夹

Article Optics

Si and Cu ablation with a 46.9-nm laser focused by a toroidal mirror

Yongpeng Zhao et al.

OPTICS EXPRESS (2015)

添加到收藏夹

Article Materials Science, Multidisciplinary

Thermal and nonthermal melting of silicon under femtosecond x-ray irradiation

Nikita Medvedev et al.

PHYSICAL REVIEW B (2015)

添加到收藏夹

Article Physics, Condensed Matter

Atomistic simulation of ion track formation in UO2

V. V. Pisarev et al.

JOURNAL OF PHYSICS-CONDENSED MATTER (2014)

添加到收藏夹

Article Physics, Condensed Matter

Electron-ion coupling effects on radiation damage in cubic silicon carbide

Chao Zhang et al.

JOURNAL OF PHYSICS-CONDENSED MATTER (2013)

添加到收藏夹

Article Physics, Applied

Nano-structuring of solid surface by extreme ultraviolet Ar8+ laser

K. Kolacek et al.

LASER AND PARTICLE BEAMS (2012)

添加到收藏夹

Proceedings Paper Engineering, Electrical & Electronic

Silica ablation process induced by focused laser plasma soft X-rays

Tetsuya Makimura et al.

PACIFIC RIM LASER DAMAGE 2011: OPTICAL MATERIALS FOR HIGH POWER LASERS (2012)

添加到收藏夹

Article Optics

Demonstration of soft x-ray laser of Ne-like Ar at 69.8 nm pumped by capillary discharge

Yongpeng Zhao et al.

OPTICS LETTERS (2011)

添加到收藏夹

Article Materials Science, Multidisciplinary

Visualization and analysis of atomistic simulation data with OVITO-the Open Visualization Tool

Alexander Stukowski

MODELLING AND SIMULATION IN MATERIALS SCIENCE AND ENGINEERING (2010)

添加到收藏夹

Article Chemistry, Multidisciplinary

Origin of Laser-Induced Near-Subwavelength Ripples: Interference between Surface Plasmons and Incident Laser

Min Huang et al.

ACS NANO (2009)

添加到收藏夹

Article Physics, Applied

On the role of surface plasmon polaritons in the formation of laser-induced periodic surface structures upon irradiation of silicon by femtosecond-laser pulses

Joern Bonse et al.

JOURNAL OF APPLIED PHYSICS (2009)

添加到收藏夹

Article Physics, Condensed Matter

The effect of electron-ion interactions on radiation damage simulations

A. M. Rutherford et al.

JOURNAL OF PHYSICS-CONDENSED MATTER (2007)

添加到收藏夹

Article Optics

Damage and ablation of large bandgap dielectrics induced by a 46.9 nm laser beam

A Ritucci et al.

OPTICS LETTERS (2006)

添加到收藏夹

Article Physics, Multidisciplinary

Electronic structure and charge transfer in 3C-and 4H-SiC

GL Zhao et al.

NEW JOURNAL OF PHYSICS (2000)

添加到收藏夹

© Peeref 2019-2024. All rights reserved.