Applications, materials, and fabrication of micro glass parts and devices: An overview

Material selection is a critical factor that affects the performance of devices and parts on a microscale. Glass is a candidate material for micro applications as it possesses notable characteristics like biocompatibility, optical transparency, mechanical rigidity, and thermal stability, to name a few. Glass-based micro parts and devices have been developed to accommodate various applications in various fields. The fields mentioned in this review article include medical, optics, metrology, microelectronics, micro-mechanisms, and microfluidics. The most significant parts and devices in each field are investigated in terms of their application, function, fabrication process and glass significance. In addition, an overview of glass materials and fabrication techniques on a micro-scale is further discussed. The review aims to shed light on the capabilities of glass as a material that has substantial potential to enhance the performance of micro parts/devices and clarify the associated challenges. Further advancements in micro-machining technologies could address one of the primary issues facing micro-glass applications in the future.

Automated summary

Material selection is crucial for the performance of micro devices and parts. Glass is a promising material for micro applications due to its biocompatibility, optical transparency, mechanical rigidity, and thermal stability. This review focuses on glass-based micro parts and devices in various fields including medical, optics, metrology, microelectronics, micro-mechanisms, and microfluidics, investigating their application, function, fabrication process, and glass significance. The overview also discusses glass materials and fabrication techniques on a micro-scale. The review highlights the potential of glass to enhance the performance of micro parts/devices and identifies the challenges it faces. Advancements in micro-machining technologies could address future issues in micro-glass applications.