期刊
JOURNAL OF PHYSICS D-APPLIED PHYSICS
卷 56, 期 16, 页码 -出版社
IOP Publishing Ltd
DOI: 10.1088/1361-6463/acbd5e
关键词
aluminium oxide; surface modifications; atmospheric pressure plasma jet; plasma electrolytic oxidation; aluminium
Erosion and oxide formation on an aluminium oxide surface and aluminium substrate can be induced by a DBD-like plasma jet at atmospheric pressure, similar to plasma electrolytic oxidation (PEO). Experimental results support the similarity of erosion mechanisms induced by the atmospheric pressure DBD-like plasma jet and PEO microdischarges. The inward growth mechanism of the oxide layer during PEO processing is substantiated by comparing aluminium oxide erosion and oxide layer deposition by the considered He-plasma jet and a PEO process.
Erosion of an aluminium oxide surface as well as a formation of an aluminium oxide coating on an aluminium substrate, comparable with erosion and oxide formation induced by plasma electrolytic oxidation (PEO), can be caused at atmospheric pressure conditions by a DBD-like (dielectric barrier discharge) plasma jet. Obtained experimental results conform a previously assumed similarity of the erosion mechanisms induced by the atmospheric pressure DBD-like plasma jet and PEO microdischarges. The mechanism of a predominantly inward growth of the oxide layer during PEO processing is substantiated based on a comparison of aluminium oxide erosion and oxide layer deposition by a treatment with the considered He-plasma jet and a PEO process.
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