Investigation of Doping Processes to Achieve Highly Doped Czochralski Germanium Ingots

Article Materials Science, Multidisciplinary

A heavily doped germanium pyramid array for tunable optical antireflection in the broadband mid-infrared range

Bongkwon Son et al.

Summary: In this work, a heavily doped germanium inverted pyramid array is proposed as a candidate for tunable antireflection in the mid-infrared range. The structure consists of inverted pyramid structures formed by metal-assisted chemical etching, with a heavy doping layer obtained through laser annealing. The inverted pyramid acts as an antireflective surface, while the heavy doping layer functions as a high reflector. The reflectance of the inverted pyramid array is observed to be suppressed on undoped Ge and increased after doping, with a consistent reflectance in different wavelength ranges. Doping concentration and depth are identified as important factors for modulating the reflection spectra. The proposed heavily doped inverted Ge pyramid array opens up possibilities for a tunable and metal-oxide-semiconductor-compatible antireflection structure in the mid-infrared range.

JOURNAL OF MATERIALS CHEMISTRY C (2022)

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Article Nanoscience & Nanotechnology

Hyper-Doped Silicon Nanoantennas and Metasurfaces for Tunable Infrared Plasmonics

Jean-Marie Poumirol et al.

Summary: The study demonstrates the experimental realization of ordered arrays of hyper-doped silicon nanodisks with localized surface plasmon resonance. The plasmon resonance can be widely tuned in a spectral window between 2 and 5 μm by adjusting the free carrier concentration. All-silicon plasmonic metasurfaces utilizing nanostructures as small as 100 nm in diameter and 23 nm in height exhibit strong infrared light absorption.

ACS PHOTONICS (2021)

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Article Crystallography