Structural and mechanical behavior of Zr-W-Ti thin film metallic glasses prepared by multitarget co-magnetron sputtering

Zr-W-Ti thin films were deposited by magnetron co-sputtering technique with varied Ti-sputtering power between 25 and 150 W. The effect of Ti-sputtering power on their physical and mechanical properties was investigated. As a results of FE-SEM, XPS, AFM, XRD, and HR-TEM investigations, the Ti-sputtering power affected the Ti-containing structure of ZrW-based films, which exhibited an amorphous phase with a very low surface roughness layer. The mechanical properties, tested by nano-indentation, revealed the films strongest hardness and elastic modulus of 8.6 GPa and 121.3 GPa, respectively. In addition, the plastic responded, especially the serrated flow and shear banding showed that the prepared Zr-W-Ti thin films were excellent candidates for surface coating as the thin film metallic glasses (TFMGs).(c) 2022 Elsevier B.V. All rights reserved.

Automated summary

Zr-W-Ti thin films were deposited by magnetron co-sputtering with different Ti-sputtering powers (25-150 W), and the effect of Ti-sputtering power on their physical and mechanical properties was investigated. Characterization techniques including FE-SEM, XPS, AFM, XRD, and HR-TEM revealed that the Ti-sputtering power influenced the Ti-containing structure of ZrW-based films, resulting in an amorphous phase with a very low surface roughness layer. Nano-indentation tests showed that the films exhibited the highest hardness and elastic modulus of 8.6 GPa and 121.3 GPa, respectively, and the plastic response was characterized by serrated flow and shear banding, suggesting that the prepared Zr-W-Ti thin films were excellent candidates for surface coating as thin film metallic glasses.