4.6 Article

A Highly Sensitive Flexible Pressure Sensor Based on Inter-Comb Structured Graphene Electrodes

期刊

IEEE TRANSACTIONS ON ELECTRON DEVICES
卷 70, 期 4, 页码 1865-1870

出版社

IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/TED.2023.3248000

关键词

Electrodes; Sensors; Sensitivity; Pressure sensors; Capacitance; Graphene; Temperature sensors; Capacitive pressure sensors; graphene electrodes; high sensitivity; inter-comb structure; laser scribe

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In this study, the sensitivity of a capacitive pressure sensor was improved by optimizing the geometry of the laser-scribed graphene (LSG) electrodes. The sensor demonstrated high sensitivity, fast response/recovery time, low detection limit, and excellent mechanical stability. The research shows the potential of inter-comb structured LSG electrodes in highly sensitive flexible pressure sensors.
Susceptible and flexible pressure sensors have broad application prospects and market demands in bionic skin, human-machine interface, and intelligent wearable electronic devices. However, optimizing the sensor's sensitivity through a simple, low-cost process is still a considerable challenge. In this work, the sensitivity of a capacitive pressure sensor was effectively improved by optimizing the geometry of the laser-scribed graphene (LSG) electrodes. The pressure sensor, based on the inter-comb structured LSG electrodes and polyvinyl pyrrolidone nanofiber membrane (PVP NM) dielectric layer, has a high sensitivity (4.352 kPa(-1) at 0-2 kPa), a fast response/recovery time (40/37 ms), an ultralow detection limit (similar to 12 Pa), and excellent mechanical stability (6000 cycles). The sensor developed in this research can be used in health monitoring such as carotid artery pulsation and respiratory disease. In addition, the 6 x 6 sensor array can precisely characterize the regional pressure distribution. This study demonstrates the significant potential of the inter-comb structured LSG electrodes in highly sensitive flexible pressure sensors.

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