4.7 Article

Fabrication, Characterization, and Signal Processing Optimization of Flexible and Wearable Piezoelectric Tactile Sensors

相关参考文献

注意:仅列出部分参考文献,下载原文获取全部文献信息。
Review Chemistry, Multidisciplinary

Textile-Based Flexible Capacitive Pressure Sensors: A Review

Min Su et al.

Summary: This paper provides a comprehensive review of recent developments in textile-based flexible capacitive pressure sensors, including sandwich structures, yarn structures, and in-plane structures. It discusses the influences of different device structures on performance and summarizes the applications of textile-based sensors in human wearable devices, robotic sensing, and human-machine interaction. The paper also highlights evolutionary trends, future directions, and challenges.

NANOMATERIALS (2022)

Article Chemistry, Multidisciplinary

Bioinspired design of highly sensitive flexible tactile sensors for wearable healthcare monitoring

J. Chen et al.

Summary: A high performance capacitive tactile sensor was developed based on a biomimetic hierarchical array structure with silver nanowires, showing improved sensitivity and response range compared to monotonous counterparts. An optimized ionic gel film as the dielectric layer further enhanced the sensor's performance, demonstrating a wide detection range and high sensitivity.

MATERIALS TODAY CHEMISTRY (2022)

Article Engineering, Electrical & Electronic

Highly sensitive and wearable bionic piezoelectric sensor for human respiratory monitoring

Yangbo Yuan et al.

Summary: A flexible bionic piezoelectric sensor inspired by the lateral line structure of fish is proposed in this study, which has a low detection limit, can conform to a cylindrical surface, and accurately sense respiratory states.

SENSORS AND ACTUATORS A-PHYSICAL (2022)

Article Chemistry, Multidisciplinary

Skin-Inspired Piezoelectric Tactile Sensor Array with Crosstalk-Free Row plus Column Electrodes for Spatiotemporally Distinguishing Diverse Stimuli

Weikang Lin et al.

Summary: This study introduces a piezoelectric tactile sensor array inspired by human skin, capable of real-time sensing and differentiation of various external stimuli in terms of magnitude, positions, and modes. The sensor array exhibits high sensitivity, long-term durability, and rapid response time, as well as scalability and ease of mass production. Its application potential includes health monitoring, detection of animal movements, and robotics.

ADVANCED SCIENCE (2021)

Article Chemistry, Physical

Hybrid printing of wearable piezoelectric sensors

Yipu Du et al.

Summary: This study presents a novel wearable piezoelectric device fabricated using a unique material and process, featuring excellent performance and stretchability without the need for sintering and poling processing. The device can be used for gesture recognition and heartbeat monitoring, offering great potential for integration with a wide range of printed electronics and wearable devices.

NANO ENERGY (2021)

Review Materials Science, Multidisciplinary

Piezoelectric materials for flexible and wearable electronics: A review

Yongling Wu et al.

Summary: This article reviews the applications of flexible piezoelectric materials in self-powered devices and micro-sensors, discussing their potential value in medical healthcare and robotics technology, as well as the properties and applications of piezoelectric materials.

MATERIALS & DESIGN (2021)

Article Chemistry, Physical

Multifunctional sub-100 μm thickness flexible piezo/triboelectric hybrid water energy harvester based on biocompatible AlN and soft parylene C-PDMS-EcoflexTM

Massimo Mariello et al.

Summary: A multifunctional, flexible and conformal hybrid nanogenerator (HNG) has been developed with a sub100 µm thickness, combining biocompatible thin-film piezo-ceramic and soft polymeric materials for harvesting energy from various water sources. The HNG exhibits enhanced power densities under tapping, with performance ranging from -6.5 mW/m2 for PENG, 65 mW/m2 for TENG, to -230 mW/m2 for HNG, demonstrating its versatility in collecting energy from different water conveyance sources such as impacts, raindrops, and buoying waves. The HNG also shows optimal and reliable energy harvesting performance under strong impulsive impacts and raindrops impacts, making it suitable for a wide range of applications.

NANO ENERGY (2021)

Article Chemistry, Multidisciplinary

Conformable AlN Piezoelectric Sensors as a Non-invasive Approach for Swallowing Disorder Assessment

Lara Natta et al.

Summary: Deglutition disorders are common symptoms that can greatly impact a patient's quality of life. Current clinical evaluation methods are subjective and lack precision. This study introduces a wearable technology using ultrathin, compliant piezoelectric patches to objectively assess swallowing ability, paving the way for a real-time evaluation system.

ACS SENSORS (2021)

Article Chemistry, Multidisciplinary

Flexible SAW Microfluidic Devices as Wearable pH Sensors Based on ZnO Nanoparticles

Luigi Piro et al.

Summary: A new flexible and biocompatible microfluidic pH sensor based on surface acoustic waves (SAWs) has been developed, using PEN as a flexible substrate and AlN as a piezoelectric material, with a sensitivity of approximately 30 kHz/pH demonstrating high potential for pH measurement in fluids and biosensing.

NANOMATERIALS (2021)

Proceedings Paper Engineering, Electrical & Electronic

A Flexible Tactile Sensor for Three-dimensional Force Detection Based on Piezoelectric Sensing

Yunyun Luo et al.

Summary: A flexible tactile sensor was proposed for measuring three-dimensional forces, showing good non-linearity and potential application in intelligent robotics for measuring multi-dimensional forces.

2021 IEEE 16TH INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS (NEMS) (2021)

Article Computer Science, Information Systems

Dataset of the Optimization of a Low Power Chemoresistive Gas Sensor: Predictive Thermal Modelling and Mechanical Failure Analysis

Andrea Gaiardo et al.

Summary: The development of standard silicon microfabrication techniques for gas sensor technology has enabled the creation of small, low-cost, and low-power consumption devices. Silicon microheaters (MHs) play a crucial role in producing MOS gas sensors. Predictive models have become crucial for defining optimal device design and layout in order to achieve low power consumption and high mechanical stability. Experimental data and statistical analysis are used to develop a predictive thermal-mechanical model for high performing silicon MHs, aiming to optimize MH design for gas sensing applications.
Review Chemistry, Multidisciplinary

Hydrothermally Grown ZnO Nanorods as Promising Materials for Low Cost Electronic Skin

Alessandro Fraleoni-Morgera et al.

CHEMNANOMAT (2020)

Article Engineering, Electrical & Electronic

Piezoelectric pressure sensor based on flexible gallium nitride thin-film for harsh-environment and high-temperature applications

Nam-In Kim et al.

SENSORS AND ACTUATORS A-PHYSICAL (2020)

Review Chemistry, Analytical

Recent Progress of Miniature MEMS Pressure Sensors

Peishuai Song et al.

MICROMACHINES (2020)

Article Chemistry, Multidisciplinary

Seedless Hydrothermal Growth of ZnO Nanorods as a Promising Route for Flexible Tactile Sensors

Ilaria Cesini et al.

NANOMATERIALS (2020)

Article Nanoscience & Nanotechnology

Flexible Piezoelectric Pressure Tactile Sensor Based on Electrospun BaTiO3/Poly(vinylidene fluoride) Nanocomposite Membrane

Jie Jiang et al.

ACS APPLIED MATERIALS & INTERFACES (2020)

Article Multidisciplinary Sciences

Wearable piezoelectric mass sensor based on pH sensitive hydrogels for sweat pH monitoring

E. Scarpa et al.

SCIENTIFIC REPORTS (2020)

Article Engineering, Electrical & Electronic

Piezoelectric PVDF-based sensors with high pressure sensitivity induced by chemical modification of electrode surfaces

Daisuke Tadaki et al.

SENSORS AND ACTUATORS A-PHYSICAL (2020)

Article Engineering, Electrical & Electronic

Flexible Piezoelectric Transducers for Energy Harvesting and Sensing from Human Kinematics

Iqra Choudhry et al.

ACS APPLIED ELECTRONIC MATERIALS (2020)

Review Nanoscience & Nanotechnology

Mini Review on Flexible and Wearable Electronics for Monitoring Human Health Information

Yiding Gu et al.

NANOSCALE RESEARCH LETTERS (2019)

Proceedings Paper Engineering, Manufacturing

Aluminium Nitride based bio-MEMS for vascular graft monitoring

L. Natta et al.

2019 22ND EUROPEAN MICROELECTRONICS AND PACKAGING CONFERENCE & EXHIBITION (EMPC) (2019)

Article Engineering, Electrical & Electronic

Biocompatible, Flexible, and Compliant Energy Harvesters Based on Piezoelectric Thin Films

Maria Teresa Todaro et al.

IEEE TRANSACTIONS ON NANOTECHNOLOGY (2018)

Review Materials Science, Biomaterials

Wearable and flexible sensors for user-interactive health-monitoring devices

Minjeong Ha et al.

JOURNAL OF MATERIALS CHEMISTRY B (2018)

Article Engineering, Electrical & Electronic

Influence of Process Parameters and Formation of Highly c-Axis Oriented AlN Thin Films on Mo by Reactive Sputtering

Sandeep Singh Chauhan et al.

JOURNAL OF ELECTRONIC MATERIALS (2018)

Review Chemistry, Analytical

Recent Developments for Flexible Pressure Sensors: A Review

Fenlan Xu et al.

MICROMACHINES (2018)

Article Physics, Condensed Matter

Recent progress of flexible and wearable strain sensors for human-motion monitoring

Gang Ge et al.

JOURNAL OF SEMICONDUCTORS (2018)

Article Engineering, Electrical & Electronic

Interface Electronics for Tactile Sensors Based on Piezoelectric Polymers

Luigi Pinna et al.

IEEE SENSORS JOURNAL (2017)

Article Electrochemistry

Electrode and Redox Potentials of Molybdenum and Stability of Molybdenum Chloro-Species in Alkali Chloride Melts

V. A. Volkovich et al.

JOURNAL OF THE ELECTROCHEMICAL SOCIETY (2017)

Article Chemistry, Multidisciplinary

Wearable Microfluidic Diaphragm Pressure Sensor for Health and Tactile Touch Monitoring

Yuji Gao et al.

ADVANCED MATERIALS (2017)

Article Chemistry, Multidisciplinary

Self-Powered Real-Time Arterial Pulse Monitoring Using Ultrathin Epidermal Piezoelectric Sensors

Dae Yong Park et al.

ADVANCED MATERIALS (2017)

Article Engineering, Electrical & Electronic

AlN-based flexible piezoelectric skin for energy harvesting from human motion

Francesco Guido et al.

MICROELECTRONIC ENGINEERING (2016)

Article Physics, Applied

Low stiffness tactile transducers based on AlN thin film and polyimide

V. M. Mastronardi et al.

APPLIED PHYSICS LETTERS (2015)

Article Engineering, Electrical & Electronic

Optimization of the force and power consumption of a microfabricated magnetic actuator

Juan Jose Zarate et al.

SENSORS AND ACTUATORS A-PHYSICAL (2015)

Article Chemistry, Multidisciplinary

Recent Progress in Electronic Skin

Xiandi Wang et al.

ADVANCED SCIENCE (2015)

Article Engineering, Biomedical

Toward Flexible and Wearable Human-Interactive Health-Monitoring Devices

Kuniharu Takei et al.

ADVANCED HEALTHCARE MATERIALS (2015)

Article Engineering, Electrical & Electronic

Piezoelectric ultrasonic transducer based on flexible AIN

Vincenzo Mariano Mastronardi et al.

MICROELECTRONIC ENGINEERING (2014)

Article Engineering, Electrical & Electronic

Mesoporous surface control of PVDF thin films for enhanced piezoelectric energy generation

Dajing Chen et al.

SENSORS AND ACTUATORS A-PHYSICAL (2014)

Review Chemistry, Analytical

Microfabricated Tactile Sensors for Biomedical Applications: A Review

Paola Saccomandi et al.

BIOSENSORS-BASEL (2014)

Article Chemistry, Multidisciplinary

Super-Flexible Nanogenerator for Energy Harvesting from Gentle Wind and as an Active Deformation Sensor

Sangmin Lee et al.

ADVANCED FUNCTIONAL MATERIALS (2013)

Article Chemistry, Analytical

' Flexible PZT Thin Film Tactile Sensor for Biomedical Monitoring

Hong-Jie Tseng et al.

SENSORS (2013)

Article Instruments & Instrumentation

Flexible-CMOS and biocompatible piezoelectric AlN material for MEMS applications

Nathan Jackson et al.

SMART MATERIALS AND STRUCTURES (2013)

Article Materials Science, Multidisciplinary

Thin-film piezoelectric MEMS

Chang-Beom Eom et al.

MRS BULLETIN (2012)

Article Nanoscience & Nanotechnology

High Potential Columnar Nanocrystalline AlN Films Deposited by RF Reactive Magnetron Sputtering

Chengzhang Han et al.

NANO-MICRO LETTERS (2012)

Article Engineering, Electrical & Electronic

Flexible dome and bump shape piezoelectric tactile sensors using PVDF-TrFE copolymer

Chunyan Li et al.

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2008)

Article Engineering, Electrical & Electronic

Etch rates for micromachining processing - Part II

KR Williams et al.

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2003)