相关参考文献
注意:仅列出部分参考文献,下载原文获取全部文献信息。33 GHz Overmoded Bulk Acoustic Resonator
Zachary Schaffer et al.
IEEE MICROWAVE AND WIRELESS COMPONENTS LETTERS (2022)
Vertical and Lateral Etch Survey of Ferroelectric AlN/Al1-xScxN in Aqueous KOH Solutions
Zichen Tang et al.
MICROMACHINES (2022)
X-Band Multi-Frequency 30% Compound SCALN Microacustic Resonators and Filters for 5G-Advanced and 6G Applications
Gabriel Giribaldi et al.
2022 JOINT CONFERENCE OF THE EUROPEAN FREQUENCY AND TIME FORUM AND IEEE INTERNATIONAL FREQUENCY CONTROL SYMPOSIUM (EFTF/IFCS) (2022)
A Low Phase Noise 30 GHz Oscillator Topology for Resonant-Fin-Transistors Based High-Q On-chip Resonators in 14 nm Technology
Abhishek Srivastava et al.
2022 35TH INTERNATIONAL CONFERENCE ON VLSI DESIGN (VLSID 2022) HELD CONCURRENTLY WITH 2022 21ST INTERNATIONAL CONFERENCE ON EMBEDDED SYSTEMS (ES 2022) (2022)
Passive High Power RF Comb Filters Using Epitaxial GaN/NbN/SiC HBARs
Vikrant J. Gokhale et al.
IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL (2021)
Toward 40GHz excitation of diamond-based HBAR
Boris P. Sorokin et al.
APPLIED PHYSICS LETTERS (2021)
High-Overtone Thin Film Ferroelectric AlScN-on-Silicon Composite Resonators
Mingyo Park et al.
IEEE ELECTRON DEVICE LETTERS (2021)
INTRINSICALLY SWITCHABLE FERROELECTRIC SCANDIUM ALUMINUM NITRIDE BULK ACOUSTIC WAVE RESONATORS
Dicheng Mo et al.
2021 21ST INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS) (2021)
Molecular Beam Epitaxy of Transition Metal Nitrides for Superconducting Device Applications
D. Scott Katzer et al.
PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE (2020)
Control of phase purity in high scandium fraction heteroepitaxial ScAlN grown by molecular beam epitaxy
Matthew T. Hardy et al.
APPLIED PHYSICS EXPRESS (2020)
Epitaxial bulk acoustic wave resonators as highly coherent multi-phonon sources for quantum acoustodynamics
Vikrant J. Gokhale et al.
NATURE COMMUNICATIONS (2020)
Temperature evolution of frequency and anharmonic phonon loss for multi-mode epitaxial HBARs
Vikrant J. Gokhale et al.
APPLIED PHYSICS LETTERS (2020)
Engineering Efficient Acoustic Power Transfer in HBARs and Other Composite Resonators
Vikrant J. Gokhale et al.
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2020)
A Film Bulk Acoustic Resonator Based on Ferroelectric Aluminum Scandium Nitride Films
Jialin Wang et al.
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2020)
AlScN: A III-V semiconductor based ferroelectric
Simon Fichtner et al.
JOURNAL OF APPLIED PHYSICS (2019)
GaN-based Periodic High-Q RF Acoustic Resonator with Integrated HEMT
Vikrant J. Gokhale et al.
2019 IEEE INTERNATIONAL ELECTRON DEVICES MEETING (IEDM) (2019)
KOH based selective wet chemical etching of AlN, AlxGa1-xN, and GaN crystals: A way towards substrate removal in deep ultraviolet-light emitting diode
W. Guo et al.
APPLIED PHYSICS LETTERS (2015)
HBAR as a High Frequency High Stress Generator
Tanay A. Gosavi et al.
2015 IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IUS) (2015)
Positioning FBAR Technology in the Frequency and Timing Domain
Rich Ruby et al.
IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL (2012)
Correlations between microstructure and Q-factor of tunable thin film bulk acoustic wave resonators
A. Vorobiev et al.
JOURNAL OF APPLIED PHYSICS (2011)