4.6 Article

Internal stress effects on the piezoelectric properties of Pb(Zr,Ti)O3 superlattice thin films grown on Si substrates

相关参考文献

注意:仅列出部分参考文献,下载原文获取全部文献信息。
Article Physics, Applied

Annealing effects on epitaxial (K,Na)NbO3 thin films grown on Si substrates

Kiyotaka Tanaka et al.

Summary: Epitaxial KNN thin films were deposited on substrates, and the effects of post-annealing on the as-deposited films were investigated. The crystal structure changed and the polarization-electric field hysteresis loop became asymmetric after annealing. The stable spontaneous polarization direction changed and a high converse piezoelectric coefficient was obtained.

JAPANESE JOURNAL OF APPLIED PHYSICS (2022)

Article Physics, Applied

In situ high-temperature X-ray diffraction measurements of Pb(Zr0.58Ti0.42)O3 epitaxial thin films grown on Si substrates

Goki Kimura et al.

Summary: The research revealed that PZT thin films exhibit coexistence of tetragonal and cubic structures at high temperatures, with a phase transition of crystallographic structure occurring during the cooling process. After high-temperature treatment, the thin films showed a large voltage dependence of the inverse piezoelectric coefficients.

JAPANESE JOURNAL OF APPLIED PHYSICS (2022)

Article Physics, Applied

High output performance of piezoelectric energy harvesters using epitaxial Pb(Zr, Ti)O3 thin film grown on Si substrate

Eun-Ji Kim et al.

Summary: This study proposes an energy harvesting device made of an epitaxial PZT thin film on a silicon substrate. The device has a large direct piezoelectric coefficient and a small relative permittivity constant, enabling high power density in piezoelectric energy harvesters. Experimental results show that the device has high output power and power density at resonant frequency and acceleration, making it suitable for high power energy harvesting applications.

APPLIED PHYSICS LETTERS (2022)

Article Physics, Applied

Crystal structure and piezoelectric properties of lead-free epitaxial (K,Na)NbO3 thin films grown on Si substrates

Kiyotaka Tanaka et al.

Summary: Epitaxial growth of lead-free (K,Na)NbO3 (KNN) thin films on (001)SrRuO3/Pt/ZrO2/Si substrates was achieved by using RF magnetron sputtering. The thin films exhibited similar lattice constants and spontaneous polarization as KNN single crystals. Moreover, the thin films had low dielectric constants and relatively high converse piezoelectric coefficients achievable at low voltages.

APPLIED PHYSICS LETTERS (2022)

Article Materials Science, Ceramics

Crystalline phase and electrical properties of lead-free piezoelectric KNN-based films with different orientations

Wen Chen et al.

JOURNAL OF THE AMERICAN CERAMIC SOCIETY (2017)

Article Engineering, Electrical & Electronic

Film-thickness and composition dependence of epitaxial thin-film PZT-based mass-sensors

Minh Duc Nguyen et al.

SENSORS AND ACTUATORS A-PHYSICAL (2013)

Article Physics, Applied

Strain effect in PbTiO3/PbZr0.2Ti0.8O3 superlattices: From polydomain to monodomain structures

C. Hubault et al.

JOURNAL OF APPLIED PHYSICS (2012)

Article Materials Science, Ceramics

PZT-Based Piezoelectric MEMS Technology

Gabriel L. Smith et al.

JOURNAL OF THE AMERICAN CERAMIC SOCIETY (2012)

Article Materials Science, Multidisciplinary

Interplay of epitaxial strain and rotations in PbTiO3/PbZrO3 superlattices from first principles

Jeroen L. Blok et al.

PHYSICAL REVIEW B (2011)

Article Engineering, Electrical & Electronic

The design, fabrication and evaluation of a MEMS PZT cantilever with an integrated Si proof mass for vibration energy harvesting

Dongna Shen et al.

JOURNAL OF MICROMECHANICS AND MICROENGINEERING (2008)

Article Physics, Condensed Matter

Effect of Nd doping on structural, dielectric and thermodynamic properties of PZT (65/35) ceramic

Md Ahamad Mohiddon et al.

PHYSICA B-CONDENSED MATTER (2007)

Article Engineering, Electrical & Electronic

MEMS power generator with transverse mode thin film PZT

YB Jeon et al.

SENSORS AND ACTUATORS A-PHYSICAL (2005)

Article Materials Science, Multidisciplinary

Thermodynamic study of c-axis-oriented epitaxial Pb(Zr,Ti)O3 thin films -: art. no. 064103

I Kanno et al.

PHYSICAL REVIEW B (2004)

Article Materials Science, Ceramics

Piezoelectric microactuator devices

R Maeda et al.

JOURNAL OF ELECTROCERAMICS (2004)

Article Engineering, Electrical & Electronic

Measurement of transverse piezoelectric properties of PZT thin films

I Kanno et al.

SENSORS AND ACTUATORS A-PHYSICAL (2003)