4.6 Article

A near spurious-free 6 GHz LLSAW resonator with large electromechanical coupling on X-cut LiNbO3/SiC bilayer substrate

相关参考文献

注意:仅列出部分参考文献,下载原文获取全部文献信息。
Article Acoustics

Large-Range Spurious Mode Elimination for Wideband SAW Filters on LiNbO3/SiO2/Si. Platform by LiNbO3 Cut Angle Modulation

Huiping Xu et al.

Summary: This study investigates the suppression of spurious modes on the LN/SiO2/Si platform by modulating the cut angle of the LiNbO3 (LN) material. The results show that the LN/SiO2/Si platform has a wider Rayleigh elimination window (REW) compared to bulk LN, making it possible to achieve spurious-free wideband surface acoustic wave (SAW) filters.

IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL (2022)

Article Engineering, Electrical & Electronic

Study of Thin Film LiNbO3 Laterally Excited Bulk Acoustic Resonators

Soumya Yandrapalli et al.

Summary: This study presents in-depth simulation and measurement results of laterally excited shear bulk acoustic resonators (XBAR) in Lithium Niobate at 5 GHz, with high electromechanical coupling factor and impedance close to 2 Ohms. The loaded quality factors at resonance and anti-resonance are found to be 340 and 150, respectively. The study also investigates the impact of geometric parameters on the resonator performance to improve its figure of merits (FoM) for 5G filter applications.

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2022)

Article Engineering, Electrical & Electronic

SAW Filters With Excellent Temperature Stability and High Power Handling Using LiTaO3/SiC Bonded Wafers

Junyao Shen et al.

Summary: The development of 5G has increased the demand for filters. This study fabricates surface acoustic wave (SAW) filters using LiTaO3/SiC bonded wafers with excellent temperature stability and power handling capabilities. The results show that bilayer substrates enhance the performance of the SAW resonators and filters, demonstrating the potential of LiTaO3/SiC-based SAW filters for RF filters in 5G.

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2022)

Article Physics, Applied

Single-crystalline LiNbO3 film based wideband SAW devices with spurious-free responses for future RF front-ends

Xingli He et al.

Summary: This work presents super-high frequency wave-guided surface acoustic wave (SAW) devices based on LiNbO3/SiO2/Si layered substrates. The devices include SAW resonators with operating frequency up to 7 GHz, observation of different wave modes, and investigation of effective coupling coefficients and quality factor. High-performance filters with a bandwidth over 300 MHz are also achieved.

APPLIED PHYSICS LETTERS (2022)

Article Physics, Applied

Al0.7Sc0.3N butterfly-shaped laterally vibrating resonator with a figure-of-merit (kt2.Qm) over 146

Zhifang Luo et al.

Summary: This work presents laterally vibrating Lamb wave resonators (LVRs) based on a 30% aluminum scandium nitride (Al0.7Sc0.3N) thin film, which show high performance and strong potential in applications of radio frequency communications and piezoelectric transducers. The Al0.7Sc0.3N LVRs are fabricated using optimized device design and simulations, achieving high-quality resonators with a thickness of 1 μm. The resonator's equivalent electric parameters are extracted, and the best Al0.7Sc0.3N LVR operates at approximately 305 MHz with a high electromechanical coupling coefficient and loaded quality factor.

APPLIED PHYSICS LETTERS (2022)

Article Engineering, Electrical & Electronic

High-Quality Film Bulk Acoustic Resonators Fabricated on AlN Films Grown by a New Two-Step Method

Xinyan Yi et al.

Summary: A new two-step growth process integrating MOCVD and PVD technologies was developed to enhance the quality of sputtering AlN films for FBAR filters. The process resulted in higher crystallinity and surface roughness compared to the one-step PVD AlN growth method, leading to improved Q-factor for FBARs. The research demonstrates the importance of optimizing the growth process to achieve high-quality AlN-based FBAR wafers.

IEEE ELECTRON DEVICE LETTERS (2022)

Article Physics, Applied

Over GHz bandwidth SAW filter based on 32° Y-X LN/SiO2/poly-Si/Si heterostructure with multilayer electrode modulation

Rongxuan Su et al.

Summary: This study constructs a novel SAW filter with a heterostructure to enhance the central frequency and bandwidth while reducing the insertion loss. It achieves these effects by optimizing the electrode design and adjusting the electrode thickness of the resonators. The SAW filter is expected to become a filtering solution for the n77 band.

APPLIED PHYSICS LETTERS (2022)

Article Physics, Applied

High-performance SH-SAW resonator using optimized 30° YX-LiNbO3/SiO2/Si

Shuxian Wu et al.

Summary: With the rapid development of 5G technology, there is a need for acoustic wave filters with large bandwidths to handle the explosive increase in data traffic. This study proposes a shear-horizontal surface acoustic wave (SH-SAW) resonator using LiNbO3 thin film to achieve large coupling and high Q simultaneously.

APPLIED PHYSICS LETTERS (2022)

Article Acoustics

Exploring Low-Loss Surface Acoustic Wave Devices on Heterogeneous Substrates

Jinbo Wu et al.

Summary: This article presents LTOS-SAW devices fabricated on sapphire substrates, which exhibit excellent temperature stability and low insertion loss. The RF performance of LTOS-SAW remains stable even at temperatures as high as 150℃, showcasing its potential for temperature-sensitive and low-loss applications.

IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL (2022)

Article Nanoscience & Nanotechnology

Aluminum scandium nitride thin-film bulk acoustic resonators for 5G wideband applications

Yang Zou et al.

Summary: Ba0.8Sc0.2N-based film bulk acoustic wave resonators show great potential in the design of wideband acoustic filters operating in the 5G band, thanks to their high-quality thin film and excellent performance.

MICROSYSTEMS & NANOENGINEERING (2022)

Article Engineering, Electrical & Electronic

Wideband and Low-Loss Surface Acoustic Wave Filter Based on 15°YX-LiNbO3/SiO2/Si Structure

Rongxuan Su et al.

Summary: This study presents a multilayer structure SAW filter with high electromechanical coupling coefficient and a ladder-type filter with large fractional bandwidth successfully fabricated. The filters exhibit excellent bandpass filtering properties with minimum insertion loss and low in-band fluctuation, showing significant improvements compared to devices built on bulk 15 degrees YX-LN substrate.

IEEE ELECTRON DEVICE LETTERS (2021)

Review Physics, Applied

High-performance surface acoustic wave devices using composite substrate structures

Shoji Kakio

Summary: This paper introduces the SAW propagation mode and analysis method, reviews composite substrate structures, and presents recent results on LSAW and the longitudinal-type LSAW properties on dissimilar-material bonded structures. The control of attenuation and large coupling factor of LSAWs and the improved properties with layered structures are discussed. Experimentally, significantly improved properties were obtained on a 4-inch wafer with specific thickness and composition compared to a single substrate.

JAPANESE JOURNAL OF APPLIED PHYSICS (2021)

Article Engineering, Electrical & Electronic

Thin-film lithium niobate-on-insulator (LNOI) shear horizontal surface acoustic wave resonators

Tzu-Hsuan Hsu et al.

Summary: This study examines the design methodology for obtaining large electromechanical coupling factor and high quality factor of shear-horizontal surface acoustic wave resonators using thin-film lithium niobate-on-insulator technology. The impact of electrode material and thickness on dispersive characteristics was intensively investigated, leading to the fabrication of high-performance devices with great potential for wide-band frequency selection in telecommunications.

JOURNAL OF MICROMECHANICS AND MICROENGINEERING (2021)

Article Engineering, Electrical & Electronic

High-Performance Surface Acoustic Wave Devices Using LiNbO3/SiO2/SiC Multilayered Substrates

Junyao Shen et al.

Summary: This study demonstrates the fabrication of high-performance radio frequency filters using 15 degrees Y-X LiNbO3/SiO2/SiC multilayered substrates. The filters exhibit characteristics such as a high electromechanical coupling coefficient and low insertion loss.

IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES (2021)

Article Engineering, Electrical & Electronic

Microwave Acoustic Devices: Recent Advances and Outlook

Songbin Gong et al.

Summary: This paper provides a short review of exciting material innovations and performance advancements in the field of microwave acoustics over the past decade. By evaluating fundamental parameters and discussing future outlooks, it aims to capture the rationales behind achieving higher performance microsystems in this area of research.

IEEE JOURNAL OF MICROWAVES (2021)

Article Acoustics

Ultra-Large-Coupling and Spurious-Free SH0 Plate Acoustic Wave Resonators Based on Thin LiNbO3

Jie Zou et al.

IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL (2020)

Article Engineering, Electrical & Electronic

A1 Resonators in 128 degrees Y-cut Lithium Niobate with Electromechanical Coupling of 46.4%

Ruochen Lu et al.

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2020)

Article Engineering, Electrical & Electronic

Large Coupling Acoustic Wave Resonators Based on LiNbO3/SiO2/Si Functional Substrate

Tzu-Hsuan Hsu et al.

IEEE ELECTRON DEVICE LETTERS (2020)

Article Engineering, Electrical & Electronic

10-60-GHz Electromechanical Resonators Using Thin-Film Lithium Niobate

Yansong Yang et al.

IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES (2020)

Article Acoustics

Optimization of LiNbO3/Quartz Substrate for High-Frequency Wideband SAW Devices Using Longitudinal Leaky Waves

Natalya F. Naumenko

IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL (2020)

Article Computer Science, Information Systems

Next Generation Wi-Fi and 5G NR-U in the 6 GHz Bands: Opportunities and Challenges

Gaurang Naik et al.

IEEE ACCESS (2020)

Article Engineering, Electrical & Electronic

High-Frequency Surface Acoustic Wave Devices Based on ZnO/SiC Layered Structure

Sulei Fu et al.

IEEE ELECTRON DEVICE LETTERS (2019)

Article Engineering, Electrical & Electronic

Comparative Study of Acoustic Wave Devices Using Thin Piezoelectric Plates in the 3-5-GHz Range

Tetsuya Kimura et al.

IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES (2019)

Article Engineering, Electrical & Electronic

Spectrum for 5G: Global Status, Challenges, and Enabling Technologies

Juho Lee et al.

IEEE COMMUNICATIONS MAGAZINE (2018)

Article Physics, Applied

High coupling and highly stable leaky surface acoustic waves on LiTaO3 thin plate bonded to quartz substrate

Junki Hayashi et al.

JAPANESE JOURNAL OF APPLIED PHYSICS (2018)

Article Engineering, Electrical & Electronic

Microwave Acoustic Wave Devices: Recent Advances on Architectures, Modeling, Materials, and Packaging

Amelie Hagelauer et al.

IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES (2018)

Article Materials Science, Multidisciplinary

FEM simulation of AlN thin layers on diamond substrates for high frequency SAW devices

S. Maouhoub et al.

DIAMOND AND RELATED MATERIALS (2016)

Article Engineering, Electrical & Electronic

Design and Analysis of Lithium-Niobate-Based High Electromechanical Coupling RF-MEMS Resonators for Wideband Filtering

Songbin Gong et al.

IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES (2013)

Article Physics, Applied

S0 Mode Lamb Wave Resonators Using LiNbO3 Thin Plate on Acoustic Multilayer Reflector

Tetsuya Kimura et al.

JAPANESE JOURNAL OF APPLIED PHYSICS (2013)

Article Physics, Applied

5.4 GHz Lamb Wave Resonator on LiNbO3 Thin Crystal Plate and Its Application

Michio Kadota et al.

JAPANESE JOURNAL OF APPLIED PHYSICS (2011)

Article Physics, Applied

Giant piezoelectric d33 coefficient in ferroelectric vanadium doped ZnO films

Y. C. Yang et al.

APPLIED PHYSICS LETTERS (2008)

Review Physics, Applied

Development of piezoelectric thin film resonator and its impact on future wireless communication systems

Y Satoh et al.

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS (2005)