期刊
APPLIED OPTICS
卷 62, 期 14, 页码 3551-3556出版社
Optica Publishing Group
DOI: 10.1364/AO.486115
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This study presents a highly accurate technique for measuring the centering error of a lens using power analysis. The technique utilizes a prism patterned with a subwavelength grating and a reflection-centering system using -1st-order rays. The optical axis error is tested and analyzed by a powermeter based on Snell's law and diffractive characteristics. Compared to autocollimation-based systems, this technique amplifies the resolution of the optical-centering error by a factor of 4, improving instrument sensitivity and reducing sensor requirements based on light direction or energy variation.
This study presents a technique for measuring the centering error of a lens. The technique uses power analysis and is highly accurate. The module is designed by a prism that is patterned using a subwavelength grating combined with a reflection-centering system by using the -1st-order rays at 5 mW and 650 nm. The optical axis error is tested and analyzed by the powermeter by using Snell's law and diffractive characteristics. The resolution of the optical-centering error in the system is amplified by a factor of 4 compared with the centering error measuring system based on autocollimation. The technique proposed in this study improves the sensitivity of the instrument and reduces the requirements of the sensor at the end side based on the direction or energy variation of the light. (c) 2023 Optica Publishing Group
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